Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065732 | Film forming method and film forming apparatus | Yukio Sano, Michikazu Nakamura, Hirokatsu Kobayashi | 2024-08-20 |
| 11390944 | Film-forming device and method for cleaning same | Yukio Sano | 2022-07-19 |
| 10689759 | Film forming apparatus | Hirokatsu Kobayashi | 2020-06-23 |
| 10550491 | Film-forming apparatus | — | 2020-02-04 |
| D766850 | Wafer holder for manufacturing semiconductor | Eisuke Morisaki, Wataru Machiyama, Hirokatsu Kobayashi, Yukio Sano | 2016-09-20 |
| 8328943 | Film forming apparatus and method | Eisuke Morisaki, Hirokatsu Kobayashi | 2012-12-11 |