Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D766850 | Wafer holder for manufacturing semiconductor | Wataru Machiyama, Hirokatsu Kobayashi, Masayuki Harashima, Yukio Sano | 2016-09-20 |
| 8696814 | Film deposition apparatus and film deposition method | Hirokatsu Kobayashi, Jun Yoshikawa, Ikuo Sawada, Tsunenobu Kimoto, Noriaki Kawamoto +1 more | 2014-04-15 |
| 8440270 | Film deposition apparatus and method | Hirokatsu Kobayashi, Jun Yoshikawa | 2013-05-14 |
| 8409460 | Forming method of amorphous carbon film, amorphous carbon film, multilayer resist film, manufacturing method of semiconductor device, and computer-readable storage medium | Hiraku Ishikawa, Tadakazu Murai | 2013-04-02 |
| 8328943 | Film forming apparatus and method | Hirokatsu Kobayashi, Masayuki Harashima | 2012-12-11 |
| 6630991 | Thermal processing apparatus | Masayuki Kitamura, Yun Mo | 2003-10-07 |
| 6488407 | Radiation temperature measuring method and radiation temperature measuring system | Masayuki Kitamura, Nobuaki Takahashi, Takashi Shigeoka | 2002-12-03 |
| 6473993 | Thermal treatment method and apparatus | Yasushi Yagi, Takeshi Sakuma, Wataru Okase, Masayuki Kitamura, Hironori Yagi | 2002-11-05 |
| 6467952 | Virtual blackbody radiation system and radiation temperature measuring system | Masayuki Kitamura, Nobuaki Takahashi, Takashi Shigeoka | 2002-10-22 |