Issued Patents All Time
Showing 1–25 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406842 | Substrate processing apparatus and method of producing semiconductor device | Yuya Matsubara, Atsuko Sakata | 2025-09-02 |
| 12388002 | Semiconductor device | — | 2025-08-12 |
| 12310017 | Semiconductor device and method for manufacturing semiconductor device | Takuya Hirohashi, Shigeru Kinoshita, Hiroshi Toyota | 2025-05-20 |
| 12205887 | Semiconductor device and method for manufacturing the semiconductor device preliminary class | Atsushi Kato, Hiroaki Matsuda | 2025-01-21 |
| 12136546 | Semiconductor device, manufacturing method thereof, and semiconductor storage device | — | 2024-11-05 |
| 12027367 | Substrate treatment apparatus and manufacturing method of semiconductor device | Takayuki BEPPU, Tomotaka ARIGA | 2024-07-02 |
| 12010845 | Method for manufacturing semiconductor device | Katsuaki Natori, Hiroshi Toyoda, Koji Yamakawa, Takayuki BEPPU | 2024-06-11 |
| 11725281 | Gas introduction structure, thermal processing apparatus and gas supply method | Shingo Hishiya, Sung Duk SON, Satoru Ogawa | 2023-08-15 |
| 11705404 | Semiconductor device and method of manufacturing the same | Satoshi Wakatsuki, Atsuko Sakata | 2023-07-18 |
| 11699731 | Semiconductor device and manufacturing method thereof | Takayuki BEPPU, Hiroshi Toyoda, Katsuaki Natori | 2023-07-11 |
| 11658110 | Semiconductor device and method for manufacturing the semiconductor device | Atsushi Kato, Hiroaki Matsuda | 2023-05-23 |
| 11393675 | Substrate processing apparatus and method of producing semiconductor device | Yuya Matsubara, Atsuko Sakata | 2022-07-19 |
| 11355512 | Semiconductor device including a plug connected to a bit line and containing tungsten | Jun Iijima, Masayoshi Tagami, Satoshi Wakatsuki | 2022-06-07 |
| 11282681 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Katsuaki Natori, Hiroshi Toyoda, Takayuki BEPPU | 2022-03-22 |
| 11189489 | Substrate treatment apparatus and manufacturing method of semiconductor device | Takayuki BEPPU, Tomotaka ARIGA | 2021-11-30 |
| 11177135 | Mask member and method for producing semiconductor device | Yuya Matsubara, Atsuko Sakata | 2021-11-16 |
| 11139173 | Production method of semiconductor device | Katsuaki Natori, Satoshi Wakatsuki | 2021-10-05 |
| 11139246 | Semiconductor device with aligned vias | Atsushi Kato | 2021-10-05 |
| 11011369 | Carbon film forming method, carbon film forming apparatus, and storage medium | Akira Shimizu, Yosuke Watanabe | 2021-05-18 |
| 11004804 | Semiconductor device and method of manufacturing the same | Satoshi Wakatsuki, Atsuko Sakata | 2021-05-11 |
| 10825770 | Semiconductor device having a stack body including metal films and first insulating films alternately stacked on a semiconductor substrate and including a stepped end portion and manufacturing method thereof | Akitsugu Hatazaki, Hiroko Tahara, Naomi Fukumaki, Takashi Ohashi | 2020-11-03 |
| 10741443 | Method for manufacturing a semiconductor device | Atsuko Sakata, Makoto Wada, Yuichi Yamazaki, Masayuki Katagiri, Akihiro Kajita +3 more | 2020-08-11 |
| 10566280 | Semiconductor device and method of manufacturing the same | Satoshi Wakatsuki, Takeshi Ishizaki, Hiroshi Itokawa, Daisuke Ikeno, Kei Watanabe +1 more | 2020-02-18 |
| 10325805 | Method for manufacturing a semiconductor device | Atsuko Sakata, Makoto Wada, Yuichi Yamazaki, Masayuki Katagiri, Akihiro Kajita +3 more | 2019-06-18 |
| 10199391 | Semiconductor device and method of manufacturing the same | Taishi ISHIKURA, Atsunobu Isobayashi, Akihiro Kajita | 2019-02-05 |