Issued Patents All Time
Showing 51–65 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8487449 | Carbon nanotube interconnection and manufacturing method thereof | Makoto Wada, Yuichi Yamazaki, Masayuki Katagiri, Atsuko Sakata, Akihiro Kajita +2 more | 2013-07-16 |
| 7923839 | Semiconductor device and method for fabricating semiconductor device | Junichi Wada, Hideto Matsuyama | 2011-04-12 |
| 7432468 | Plasma processing apparatus and plasma processing method | Shinsuke Oka, Takahiro Horiguchi, Kazuaki Nishimura, Tadahiro Ohmi, Masaki Hirayama | 2008-10-07 |
| 6630991 | Thermal processing apparatus | Eisuke Morisaki, Yun Mo | 2003-10-07 |
| 6566630 | Thermal processing apparatus for introducing gas between a target object and a cooling unit for cooling the target object | — | 2003-05-20 |
| 6488407 | Radiation temperature measuring method and radiation temperature measuring system | Eisuke Morisaki, Nobuaki Takahashi, Takashi Shigeoka | 2002-12-03 |
| 6473993 | Thermal treatment method and apparatus | Yasushi Yagi, Takeshi Sakuma, Wataru Okase, Hironori Yagi, Eisuke Morisaki | 2002-11-05 |
| 6467952 | Virtual blackbody radiation system and radiation temperature measuring system | Eisuke Morisaki, Nobuaki Takahashi, Takashi Shigeoka | 2002-10-22 |
| 6444262 | Thermal processing unit and thermal processing method | Tomohiro Shiotani, Isao Tafusa | 2002-09-03 |
| 6435869 | Quartz window having reinforcing ribs | — | 2002-08-20 |
| 6007633 | Single-substrate-processing apparatus in semiconductor processing system | Harunori Ushikawa | 1999-12-28 |
| 5958140 | One-by-one type heat-processing apparatus | Junichi Arami, Kenji Ishikawa | 1999-09-28 |
| 5581874 | Method of forming a bonding portion | Makoto Aoki, Mitsuaki Komino | 1996-12-10 |
| 5575853 | Vacuum exhaust system for processing apparatus | Junichi Arami, Mitsuaki Komino | 1996-11-19 |
| 4511191 | Anticreep device for annular member | — | 1985-04-16 |