Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300469 | Plasma processing apparatus, calculation method, and calculation program | — | 2025-05-13 |
| 12278126 | Plasma processing apparatus, thermal resistance acquisition method, and thermal resistance acquisition program | — | 2025-04-15 |
| 12243728 | Substrate holding method and substrate processing apparatus | — | 2025-03-04 |
| 12142462 | Method of reducing leakage of heat transfer gas and plasma processing apparatus | Akira Takahashi, Daisuke Tamura, Tsubasa Shimomura | 2024-11-12 |
| 12087559 | Plasma processing apparatus, temperature control method, and temperature control program | — | 2024-09-10 |
| 12063717 | Plasma processing apparatus, and temperature control method | — | 2024-08-13 |
| 12027349 | Plasma processing apparatus | — | 2024-07-02 |
| 11935731 | Plasma processing apparatus, plasma state detection method, and plasma state detection program | Daisuke Hayashi, Yoshihiro Umezawa | 2024-03-19 |
| 11862438 | Plasma processing apparatus, calculation method, and calculation program | — | 2024-01-02 |
| 11621177 | Plasma processing apparatus and calculation method | — | 2023-04-04 |
| 11594399 | Cleaning method and plasma processing apparatus | — | 2023-02-28 |
| 11557468 | Plasma processing apparatus, temperature control method, and temperature control program | — | 2023-01-17 |
| 11546970 | Plasma processing apparatus and temperature control method | — | 2023-01-03 |
| 11488808 | Plasma processing apparatus, calculation method, and calculation program | — | 2022-11-01 |
| 11424102 | Model generation apparatus, model generation program, and model generation method | — | 2022-08-23 |
| 11069545 | Substrate processing apparatus, temperature control method, and temperature control program | — | 2021-07-20 |
| 11049743 | Substrate processing apparatus, flow rate control method, and storage medium storing flow rate control program | — | 2021-06-29 |
| 10892144 | Plasma processing apparatus, monitoring method, and monitoring program | — | 2021-01-12 |
| 7833826 | Film formation method, thin-film transistor and solar battery | — | 2010-11-16 |
| 7432468 | Plasma processing apparatus and plasma processing method | Takahiro Horiguchi, Kazuaki Nishimura, Masayuki Kitamura, Tadahiro Ohmi, Masaki Hirayama | 2008-10-07 |
| 6320154 | Plasma processing method | Takashi Akahori, Risa Nakase | 2001-11-20 |