Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770332 | Method for forming film by plasma | Takeshi Aoki, Akira Suzuki, Yoshihiro Kato | 2004-08-03 |
| 6544901 | Plasma thin-film deposition method | — | 2003-04-08 |
| 6443165 | Method for cleaning plasma treatment device and plasma treatment system | Takashi Akahori, Masaki Tozawa, Yoko Naito, Shuichi Ishizuka, Masahide Saito +1 more | 2002-09-03 |
| 6355902 | Plasma film forming method and plasma film forming apparatus | Takashi Akahori, Masaki Tozawa, Yoko Naito, Osamu Yokoyama, Shuichi Ishizuka +4 more | 2002-03-12 |
| 6320154 | Plasma processing method | Takashi Akahori, Shinsuke Oka | 2001-11-20 |
| 6215087 | Plasma film forming method and plasma film forming apparatus | Takashi Akahori, Masaki Tozawa, Yoko Naito, Osamu Yokoyama, Shuichi Ishizuka +4 more | 2001-04-10 |
| 6087614 | Plasma treating device | Shuichi Ishizuka, Takeshi Aoki | 2000-07-11 |