Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8394231 | Plasma process device and plasma process method | Koichi Takatsuki, Hikaru Yoshitaka, Shigeo Ashigaki, Yoichi Inoue, Shuuichi Ishizuka +7 more | 2013-03-12 |
| 6949829 | Semiconductor device and fabrication method therefor | Gishi Chung, Kohei Kawamura | 2005-09-27 |
| 6767829 | Plasma deposition method and system | — | 2004-07-27 |
| 6737350 | Method of manufacturing semiconductor device | Kouichiro Inazawa, Kouji Senoo, Masaaki Hagiwara | 2004-05-18 |
| 6727182 | Process for the production of semiconductor device | Shuichi Ishizuka, Shunichi Endo, Takeshi Aoki, Tadashi Hirata | 2004-04-27 |
| 6720659 | Semiconductor device having an adhesion layer | — | 2004-04-13 |
| 6479897 | Semiconductor device having fluorine-added carbon dielectric film and method of fabricating the same | Akira Suzuki | 2002-11-12 |
| 6443165 | Method for cleaning plasma treatment device and plasma treatment system | Masaki Tozawa, Yoko Naito, Risa Nakase, Shuichi Ishizuka, Masahide Saito +1 more | 2002-09-03 |
| 6355902 | Plasma film forming method and plasma film forming apparatus | Masaki Tozawa, Yoko Naito, Risa Nakase, Osamu Yokoyama, Shuichi Ishizuka +4 more | 2002-03-12 |
| 6337290 | Semiconductor device having fluorine-added carbon dielectric film and method of fabricating the same | Akira Suzuki | 2002-01-08 |
| 6320154 | Plasma processing method | Risa Nakase, Shinsuke Oka | 2001-11-20 |
| 6218299 | Semiconductor device and method for producing the same | Yoko Naito, Shunichi Endo, Masahide Saito, Takeshi Aoki, Tadashi Hirata | 2001-04-17 |
| 6215087 | Plasma film forming method and plasma film forming apparatus | Masaki Tozawa, Yoko Naito, Risa Nakase, Osamu Yokoyama, Shuichi Ishizuka +4 more | 2001-04-10 |
| 5508066 | Method for forming a thin film | — | 1996-04-16 |
| 5386408 | Optical recording carrier and optical recording process | — | 1995-01-31 |
| 5296404 | Method for forming a thin film for a semiconductor device | Akira Tanihara | 1994-03-22 |
| 4960071 | Thin film forming apparatus | Satoshi Nakayama | 1990-10-02 |
| 4884051 | Semiconductor diffusion type force sensing apparatus | Junichi Takahashi, Daisuke Kosaka, Hirotoshi Eguchi, Shoji Matsumoto, Hiroshi Yamazaki +1 more | 1989-11-28 |