Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7636608 | Method for dynamic sensor configuration and runtime execution | Merritt Funk | 2009-12-22 |
| 7113838 | Method and apparatus for monitoring tool performance | Merritt Funk | 2006-09-26 |
| 6443165 | Method for cleaning plasma treatment device and plasma treatment system | Takashi Akahori, Yoko Naito, Risa Nakase, Shuichi Ishizuka, Masahide Saito +1 more | 2002-09-03 |
| 6355902 | Plasma film forming method and plasma film forming apparatus | Takashi Akahori, Yoko Naito, Risa Nakase, Osamu Yokoyama, Shuichi Ishizuka +4 more | 2002-03-12 |
| 6215087 | Plasma film forming method and plasma film forming apparatus | Takashi Akahori, Yoko Naito, Risa Nakase, Osamu Yokoyama, Shuichi Ishizuka +4 more | 2001-04-10 |