Issued Patents All Time
Showing 1–25 of 104 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272520 | Process control enabled VDC sensor for plasma process | Peter Ventzek, Alok Ranjan, Barton Lane, Justin Moses, Chelsea DuBose | 2025-04-08 |
| 12224164 | Radio frequency (RF) system with embedded RF signal pickups | Chelsea DuBose, Barton Lane, Justin Moses, Yohei Yamazawa | 2025-02-11 |
| 12176183 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Yohei Yamazawa, Justin Moses, Chelsea DuBose, Michael Hummel | 2024-12-24 |
| 12119207 | Apparatus for plasma processing | Barton Lane | 2024-10-15 |
| 12074390 | Parallel resonance antenna for radial plasma control | Chelsea DuBose, Barton Lane, Justin Moses | 2024-08-27 |
| 12057293 | Methods for real-time pulse measurement and pulse timing adjustment to control plasma process performance | Peter Ventzek, Alok Ranjan | 2024-08-06 |
| 11817296 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Yohei Yamazawa, Justin Moses, Chelsea DuBose, Michael Hummel | 2023-11-14 |
| 11728135 | Electric pressure systems for control of plasma properties and uniformity | Jianping Zhao, Lee Chen, Zhiying Chen | 2023-08-15 |
| 11721524 | Power generation systems and methods for plasma stability and control | Chelsea DuBose, Justin Moses, Kazuki Moyama, Kazushi Kaneko | 2023-08-08 |
| 11600474 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Yohei Yamazawa, Justin Moses, Chelsea DuBose, Michael Hummel | 2023-03-07 |
| 11410832 | RF measurement system and method | Yohei Yamazawa, Chelsea DuBose, Barton Lane | 2022-08-09 |
| 11393663 | Methods and systems for focus ring thickness determinations and feedback control | Alok Ranjan, Barton Lane, Peter Ventzek, Justin Moses, Chelsea DuBose | 2022-07-19 |
| 11094507 | Power generation systems and methods for plasma stability and control | Chelsea DuBose, Justin Moses, Kazuki Moyama, Kazushi Kaneko | 2021-08-17 |
| 11050394 | Modules, multi-stage systems, and related methods for radio frequency power amplifiers | Chelsea DuBose, Justin Moses, Kazuki Moyama, Kazushi Kaneko | 2021-06-29 |
| 10796916 | Microwave plasma device | Jianping Zhao, Lee Chen | 2020-10-06 |
| 10510512 | Methods and systems for controlling plasma performance | Megan Doppel, Kazuki Moyama, Chelsea DuBose, Justin Moses | 2019-12-17 |
| 10424462 | Multi-cell resonator microwave surface-wave plasma apparatus | Megan Doppel, John Entralgo, Jianping Zhao, Toshihisa Nozawa | 2019-09-24 |
| 10395903 | Self-sustained non-ambipolar direct current (DC) plasma at low power | Zhiying Chen, Lee Chen | 2019-08-27 |
| 10388528 | Non-ambipolar electric pressure plasma uniformity control | Lee Chen, Zhiying Chen, Jianping Zhao | 2019-08-20 |
| 10375812 | Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Radha Sundararajan | 2019-08-06 |
| 10354841 | Plasma generation and control using a DC ring | Jianping Zhao, Lee Chen, Barton Lane, Radha Sundararajan | 2019-07-16 |
| 9978568 | Self-sustained non-ambipolar direct current (DC) plasma at low power | Zhiying Chen, Lee Chen | 2018-05-22 |
| 9947515 | Microwave surface-wave plasma device | Jianping Zhao, Lee Chen, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more | 2018-04-17 |
| 9941126 | Microwave plasma device | Jianping Zhao, Lee Chen | 2018-04-10 |
| 9934974 | Microwave plasma device | Jianping Zhao, Lee Chen | 2018-04-03 |