Issued Patents All Time
Showing 51–75 of 104 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8486798 | Variable capacitance chamber component incorporating a semiconductor junction and methods of manufacturing and using thereof | Zhiying Chen, Jianping Zhao, Lee Chen, Radha Sundararajan | 2013-07-16 |
| 8415884 | Stable surface wave plasma source | Lee Chen, Jianping Zhao, Ronald Victor Bravenec | 2013-04-09 |
| 8343371 | Apparatus and method for improving photoresist properties using a quasi-neutral beam | Lee Chen, Radha Sundararajan | 2013-01-01 |
| 8323521 | Plasma generation controlled by gravity-induced gas-diffusion separation (GIGDS) techniques | Jianping Zhao, Lee Chen, Toshihisa Nozawa | 2012-12-04 |
| 8276540 | Method and system for introducing process fluid through a chamber component | Lee Chen | 2012-10-02 |
| 8183062 | Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences | Radha Sundararajan, Asao Yamashita, Daniel Prager | 2012-05-22 |
| 8175736 | Method and system for performing a chemical oxide removal process | Masayuki Tomoyasu, Kevin Pinto, Masaya Odagiri, Lemuel Chen, Asao Yamashita +2 more | 2012-05-08 |
| 8100082 | Method and system for introducing process fluid through a chamber component | Lee Chen | 2012-01-24 |
| 8038834 | Method and system for controlling radical distribution | David V. Horak, Eric J. Strang, Lee Chen | 2011-10-18 |
| 8019458 | Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures | Radha Sundararajan, Asao Yamashita, Daniel Prager, Hyung Joo Lee | 2011-09-13 |
| 7993937 | DC and RF hybrid processing system | Lee Chen | 2011-08-09 |
| 7988813 | Dynamic control of process chemistry for improved within-substrate process uniformity | Lee Chen, Radha Sundararajan | 2011-08-02 |
| 7967995 | Multi-layer/multi-input/multi-output (MLMIMO) models and method for using | Radha Sundararajan, Hyung Joo Lee, Daniel Prager, Asao Yamashita | 2011-06-28 |
| 7939450 | Method and apparatus for spacer-optimization (S-O) | Asao Yamashita, Daniel Prager, Lee Chen, Radha Sundararajan | 2011-05-10 |
| 7899637 | Method and apparatus for creating a gate optimization evaluation library | Asao Yamashita, Daniel Prager, Lee Chen, Radha Sundararajan | 2011-03-01 |
| 7894927 | Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures | Radha Sundararajan, Asao Yamashita, Daniel Prager, Hyung Joo Lee | 2011-02-22 |
| 7877161 | Method and system for performing a chemical oxide removal process | Masayuki Tomoyasu, Kevin Pinto, Masaya Odagiri, Lemuel Chen, Asao Yamashita +2 more | 2011-01-25 |
| 7875555 | Method for plasma processing over wide pressure range | Lee Chen | 2011-01-25 |
| 7801635 | Real-time parameter tuning for etch processes | Sachin G. Deshpande, Kevin Lally | 2010-09-21 |
| 7772544 | Neutral beam source and method for plasma heating | Lee Chen | 2010-08-10 |
| 7765077 | Method and apparatus for creating a Spacer-Optimization (S-O) library | Asao Yamashita, Daniel Prager, Lee Chen, Radha Sundaranajan | 2010-07-27 |
| 7732759 | Multi-plasma neutral beam source and method of operating | Lee Chen | 2010-06-08 |
| 7718030 | Method and system for controlling radical distribution | David V. Horak, Eric J. Strang, Lee Chen | 2010-05-18 |
| 7713758 | Method and apparatus for optimizing a gate channel | Asao Yamashita, Daniel Prager, Lee Chen, Radha Sundararajan | 2010-05-11 |
| 7674636 | Dynamic temperature backside gas control for improved within-substrate process uniformity | Radha Sundararajan, Lee Chen | 2010-03-09 |