Issued Patents All Time
Showing 76–100 of 104 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7642102 | Real-time parameter tuning using wafer thickness | Sachin G. Deshpande, Kevin Lally | 2010-01-05 |
| 7636608 | Method for dynamic sensor configuration and runtime execution | Masaki Tozawa | 2009-12-22 |
| 7623978 | Damage assessment of a wafer using optical metrology | Kevin Lally, Radha Sundararajan | 2009-11-24 |
| 7619731 | Measuring a damaged structure formed on a wafer using optical metrology | Kevin Lally, Radha Sundararajan | 2009-11-17 |
| 7576851 | Creating a library for measuring a damaged structure formed on a wafer using optical metrology | Kevin Lally, Radha Sundararajan | 2009-08-18 |
| 7576018 | Method for flexing a substrate during processing | — | 2009-08-18 |
| 7571074 | Method of using a wafer-thickness-dependant profile library | Sachin G. Deshpande, Kevin Lally | 2009-08-04 |
| 7567700 | Dynamic metrology sampling with wafer uniformity control | Radha Sundararajan, Daniel Prager, Wesley C. Natzle | 2009-07-28 |
| 7542859 | Creating a virtual profile library | Daniel Prager | 2009-06-02 |
| 7517708 | Real-time parameter tuning using wafer temperature | Sachin G. Deshpande | 2009-04-14 |
| 7502660 | Feature dimension deviation correction system, method and program product | David V. Horak, Wesley C. Natzle, Kevin Lally, Daniel Prager | 2009-03-10 |
| 7502709 | Dynamic metrology sampling for a dual damascene process | Radha Sundararajan, Daniel Prager, Wesley C. Natzle | 2009-03-10 |
| 7487053 | Refining a virtual profile library | Daniel Prager | 2009-02-03 |
| 7479463 | Method for heating a chemically amplified resist layer carried on a rotating substrate | John Kulp, Michael A. Carcasi | 2009-01-20 |
| 7477960 | Fault detection and classification (FDC) using a run-to-run controller | James E. Willis, Kevin Lally, Kevin Pinto, Masayuki Tomoyasu, Raymond Peterson +1 more | 2009-01-13 |
| 7451054 | Method of using a wafer-temperature-dependent profile library | Sachin G. Deshpande | 2008-11-11 |
| 7451011 | Process control using physical modules and virtual modules | Wesley C. Natzle | 2008-11-11 |
| 7395131 | Method for processing data based on the data context | — | 2008-07-01 |
| 7328418 | Iso/nested control for soft mask processing | Asao Yamashita, Daniel Prager | 2008-02-05 |
| 7324193 | Measuring a damaged structure formed on a wafer using optical metrology | Kevin Lally, Radha Sundararajan | 2008-01-29 |
| 7305322 | Using a virtual profile library | Daniel Prager | 2007-12-04 |
| 7292906 | Formula-based run-to-run control | Kevin Pinto, Asao Yamashita, Wesley C. Natzle | 2007-11-06 |
| 7289864 | Feature dimension deviation correction system, method and program product | David V. Horak, Wesley C. Natzle, Kevin Lally, Daniel Prager | 2007-10-30 |
| 7212878 | Wafer-to-wafer control using virtual modules | Wesley C. Natzle | 2007-05-01 |
| 7209798 | Iso/nested cascading trim control with model feedback updates | Asao Yamashita, Daniel Prager | 2007-04-24 |