Issued Patents All Time
Showing 25 most recent of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9263276 | High-k/metal gate transistor with L-shaped gate encapsulation layer | Renee T. Mo, Vijay Narayanan, Jeffrey W. Sleight | 2016-02-16 |
| 9252018 | High-k/metal gate transistor with L-shaped gate encapsulation layer | Renee T. Mo, Vijay Narayanan, Jeffrey W. Sleight | 2016-02-02 |
| 8900961 | Selective deposition of germanium spacers on nitride | Ashima B. Chakravarti, Anthony I. Chou, Toshiharu Furukawa, Steven J. Holmes | 2014-12-02 |
| 8575709 | High-k dielectric gate structures resistant to oxide growth at the dielectric/silicon substrate interface and methods of manufacture thereof | Huiming Bu, Michael P. Chudzik, Wei He, William K. Henson, Siddarth A. Krishnan +2 more | 2013-11-05 |
| 8492803 | Field effect device with reduced thickness gate | Ricky S. Amos, Siddhartha Panda, Brian L. Tessier | 2013-07-23 |
| 8318565 | High-k dielectric gate structures resistant to oxide growth at the dielectric/silicon substrate interface and methods of manufacture thereof | Huiming Bu, Michael P. Chudzik, Wei He, William K. Henson, Siddarth A. Krishnan +2 more | 2012-11-27 |
| 8198103 | Addition of ballast hydrocarbon gas to doped polysilicon etch masked by resist | Timothy J. Dalton, Paul W. Pastel, Richard S. Wise, Hongwen Yan, Ying Zhang | 2012-06-12 |
| 7955926 | Structure and method to control oxidation in high-k gate structures | Renee T. Mo, Rashmi Jha, Kathryn T. Schonenberg, Richard A. Conti | 2011-06-07 |
| 7859013 | Metal oxide field effect transistor with a sharp halo | Huajie Chen, Judson R. Holt, Rangarajan Jagannathan, Michael Sievers, Richard S. Wise | 2010-12-28 |
| 7851299 | Subgroundrule space for improved metal high-k device | — | 2010-12-14 |
| 7705385 | Selective deposition of germanium spacers on nitride | Ashima B. Chakravarti, Anthony I. Chou, Toshiharu Furukawa, Steven J. Holmes | 2010-04-27 |
| 7567700 | Dynamic metrology sampling with wafer uniformity control | Merritt Funk, Radha Sundararajan, Daniel Prager | 2009-07-28 |
| 7502709 | Dynamic metrology sampling for a dual damascene process | Merritt Funk, Radha Sundararajan, Daniel Prager | 2009-03-10 |
| 7502660 | Feature dimension deviation correction system, method and program product | David V. Horak, Merritt Funk, Kevin Lally, Daniel Prager | 2009-03-10 |
| 7498271 | Nitrogen based plasma process for metal gate MOS device | Ricardo A. Donaton, Rashmi Jha, Siddarth A. Krishnan, Xi Li, Renee T. Mo +3 more | 2009-03-03 |
| 7470629 | Structure and method to fabricate finfet devices | Bruce B. Doris | 2008-12-30 |
| 7459382 | Field effect device with reduced thickness gate | Ricky S. Amos, Siddhartha Panda, Brian L. Tessier | 2008-12-02 |
| 7451011 | Process control using physical modules and virtual modules | Merritt Funk | 2008-11-11 |
| 7384835 | Metal oxide field effect transistor with a sharp halo and a method of forming the transistor | Huajie Chen, Judson R. Holt, Rangarajan Jagannathan, Michael Sievers, Richard S. Wise | 2008-06-10 |
| 7344983 | Clustered surface preparation for silicide and metal contacts | Sadanand V. Deshpande, Ying Li, Kevin E. Mello, Renee T. Mo, Kirk D. Peterson +1 more | 2008-03-18 |
| 7344965 | Method of etching dual pre-doped polysilicon gate stacks using carbon-containing gaseous additions | Ying Zhang, Timothy J. Dalton | 2008-03-18 |
| 7292906 | Formula-based run-to-run control | Merritt Funk, Kevin Pinto, Asao Yamashita | 2007-11-06 |
| 7289864 | Feature dimension deviation correction system, method and program product | David V. Horak, Merritt Funk, Kevin Lally, Daniel Prager | 2007-10-30 |
| 7212878 | Wafer-to-wafer control using virtual modules | Merritt Funk | 2007-05-01 |
| 7211496 | Freestanding multiplayer IC wiring structure | — | 2007-05-01 |