Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8198103 | Addition of ballast hydrocarbon gas to doped polysilicon etch masked by resist | Timothy J. Dalton, Wesley C. Natzle, Richard S. Wise, Hongwen Yan, Ying Zhang | 2012-06-12 |
| 6420274 | Method for conditioning process chambers | John Baker, Marc W. Cantell, Alejandro G. Schrott, Ying Zhang | 2002-07-16 |
| 6403393 | Device having integrated optical and copper conductors and method of fabricating same | James W. Adkisson, Anthony K. Stamper | 2002-06-11 |
| 6387596 | Method of forming resist images by periodic pattern removal | Daniel C. Cole, Edward W. Conrad, David V. Horak, Randy W. Mann, Jed H. Rankin +1 more | 2002-05-14 |
| 6197656 | Method of forming planar isolation and substrate contacts in SIMOX-SOI. | James W. Adkisson, Jerome B. Lasky, Jed H. Rankin | 2001-03-06 |
| 6015745 | Method for semiconductor fabrication | James W. Adkisson, Jerome B. Lasky, Jed H. Rankin | 2000-01-18 |
| 5981148 | Method for forming sidewall spacers using frequency doubling hybrid resist and device formed thereby | Jeffrey S. Brown, James S. Dunn, Steven J. Holmes, Cuc K. Huynh, Robert K. Leidy | 1999-11-09 |
| 5976768 | Method for forming sidewall spacers using frequency doubling hybrid resist and device formed thereby | Jeffrey S. Brown, James S. Dunn, Steven J. Holmes, Cuc K. Huynh, Robert K. Leidy | 1999-11-02 |
| 5498313 | Symmetrical etching ring with gas control | Michael Edward Bailey, Dinh Dang, James G. Michael, Timothy E. Neary, Sylvia Tousley +1 more | 1996-03-12 |