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2014-09-30 |
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Diffused extrinsic base and method for fabrication |
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Low defect pre-emitter and pre-base oxide etch for bipolar transistors and related tooling |
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Integrated cobalt silicide process for semiconductor devices |
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Method of manufacture of MOSFET device with in-situ doped, raised source and drain structures |
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2004-08-10 |
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Method of fabricating a bipolar transistor having a realigned emitter |
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| 6541351 |
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Plasma etch pre-silicide clean |
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2001-07-03 |
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Integrated cobalt silicide process for semiconductor devices |
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2001-02-06 |
