Issued Patents All Time
Showing 25 most recent of 167 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195839 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman | 2025-01-14 |
| 11566319 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman | 2023-01-31 |
| 11566318 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman | 2023-01-31 |
| 11566317 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman | 2023-01-31 |
| 11508618 | Multicolor self-aligned contact selective etch | Yung-Chen Lin, Qingjun Zhou, Ho-yung David Hwang | 2022-11-22 |
| 11424136 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2022-08-23 |
| 11094589 | Multicolor self-aligned contact selective etch | Yung-Chen Lin, Qingjun Zhou, Ho-yung David Hwang | 2021-08-17 |
| 10930526 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2021-02-23 |
| 10840138 | Selectively etched self-aligned via processes | Yung-Chen Lin, Qingjun Zhou, Ho-yung David Hwang | 2020-11-17 |
| 10796888 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2020-10-06 |
| 10770568 | Method to remove III-V materials in high aspect ratio structures | Xinyu BAO, Qingjun Zhou, YungChen Lin | 2020-09-08 |
| 10741393 | Methods for bottom up fin structure formation | Yung-Chen Lin, Qingjun Zhou, Xinyu BAO | 2020-08-11 |
| 10692728 | Use of selective aluminum oxide etch | Qingjun Zhou, Yung-Chen Lin | 2020-06-23 |
| 10600688 | Methods of producing self-aligned vias | Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Uday Mitra | 2020-03-24 |
| 10593594 | Selectively etched self-aligned via processes | Yung-Chen Lin, Qingjun Zhou, Ho-yung David Hwang, Uday Mitra, Regina Freed | 2020-03-17 |
| 10573555 | Methods of producing self-aligned grown via | Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Uday Mitra, Abhijit Basu Mallick | 2020-02-25 |
| 10553485 | Methods of producing fully self-aligned vias and contacts | Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Uday Mitra, Abhijit Basu Mallick +1 more | 2020-02-04 |
| 10522404 | Fully self-aligned via | Abhijit Basu Mallick, Regina Freed, Nitin K. Ingle, Uday Mitra, Ho-yung David Hwang | 2019-12-31 |
| 10510540 | Mask scheme for cut pattern flow with enlarged EPE window | Qingjun Zhou, Yung-Chen Lin, Ho-yung David Hwang | 2019-12-17 |
| 10510602 | Methods of producing self-aligned vias | Abhijit Basu Mallick, Yung-Chen Lin, Qingjun Zhou, He Ren, Ho-yung David Hwang +1 more | 2019-12-17 |
| 10453684 | Method for patterning a material layer with desired dimensions | Lin Zhou | 2019-10-22 |
| 10439047 | Methods for etch mask and fin structure formation | Yung-Chen Lin, Qingjun Zhou | 2019-10-08 |
| 10424507 | Fully self-aligned via | Abhijit Basu Mallick, Regina Freed, Nitin K. Ingle, Uday Mitra, Ho-yung David Hwang | 2019-09-24 |
| 10418229 | Aerosol deposition coating for semiconductor chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho | 2019-09-17 |
| 10410921 | Fully self-aligned via | Abhijit Basu Mallick, Regina Freed, Nitin K. Ingle, Uday Mitra, Ho-yung David Hwang | 2019-09-10 |