Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195839 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2025-01-14 |
| 12162115 | Chamber components with polished internal apertures | Jennifer Y. Sun, David Koonce, Biraja P. Kanungo | 2024-12-10 |
| 12094716 | Chambers and coatings for reducing backside damage | Leonard Tedeschi, Kartik Ramaswamy, Benjamin Schwarz, Changgong Wang, Sumanth Banda +1 more | 2024-09-17 |
| 11920234 | Yttrium oxide based coating composition | Christopher Laurent Beaudry, Hyun-Ho Doh, Joseph Behnke, Joseph F. Sommers | 2024-03-05 |
| 11773479 | Plasma erosion resistant thin film coating for high temperature application | Biraja P. Kanungo, Jennifer Y. Sun, Martin Jeff Salinas, Jared Ahmad Lee | 2023-10-03 |
| 11724353 | Chamber components with polished internal apertures | Jennifer Y. Sun, David Koonce, Biraja P. Kanungo | 2023-08-15 |
| 11680308 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho | 2023-06-20 |
| 11661650 | Yttrium oxide based coating composition | Christopher Laurent Beaudry, Hyun-Ho Doh, Joseph Behnke, Joseph F. Sommers | 2023-05-30 |
| 11566319 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566318 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566317 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11424136 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2022-08-23 |
| 11370078 | Chamber components with polished internal apertures | Jennifer Y. Sun, David Koonce, Biraja P. Kanungo | 2022-06-28 |
| 11053581 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho | 2021-07-06 |
| 10975469 | Plasma resistant coating of porous body by atomic layer deposition | Sumanth Banda, Rajinder Dhindsa, Daniel Sang Byun, Dana Marie Lovell | 2021-04-13 |
| 10930526 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2021-02-23 |
| 10818481 | Smart device fabrication via precision patterning | Jennifer Y. Sun, Yikai Chen, Biraja P. Kanungo | 2020-10-27 |
| 10815562 | Plasma erosion resistant thin film coating for high temperature application | Biraja P. Kanungo, Jennifer Y. Sun, Martin Jeff Salinas, Jared Ahmad Lee | 2020-10-27 |
| 10796888 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2020-10-06 |
| 10745805 | Plasma resistant coating of porous body by atomic layer deposition | Sumanth Banda, Rajinder Dhindsa, Daniel Sang Byun, Dana Marie Lovell | 2020-08-18 |
| 10730798 | Slurry plasma spray of plasma resistant ceramic coating | Jennifer Y. Sun, Biraja P. Kanungo, Yikai Chen | 2020-08-04 |
| 10563297 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Biraja P. Kanungo | 2020-02-18 |
| 10544500 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Biraja P. Kanungo | 2020-01-28 |
| 10501843 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho | 2019-12-10 |
| 10260160 | High purity metallic top coat for semiconductor manufacturing components | Jennifer Y. Sun | 2019-04-16 |