| 12195839 |
Ion beam sputtering with ion assisted deposition for coatings on chamber components |
Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang |
2025-01-14 |
|
| 11856706 |
Method and system for improving the operation of semiconductor processing |
Hsui Yang, Yao-Hung YANG, Jeevan Shanbhag, Chien-Min Liao, Earl Hunter +4 more |
2023-12-26 |
$30,871,000 |
| 11680308 |
Plasma erosion resistant rare-earth oxide based thin film coatings |
Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor |
2023-06-20 |
$48,645,000 |
| 11566317 |
Ion beam sputtering with ion assisted deposition for coatings on chamber components |
Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang |
2023-01-31 |
$29,381,000 |
| 11566319 |
Ion beam sputtering with ion assisted deposition for coatings on chamber components |
Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang |
2023-01-31 |
$29,381,000 |
| 11566318 |
Ion beam sputtering with ion assisted deposition for coatings on chamber components |
Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang |
2023-01-31 |
$29,381,000 |
| 11560913 |
Brazed joint and semiconductor processing chamber component having the same |
Govinda Raj, Hamid Mohiuddin, Ian Widlow |
2023-01-24 |
$45,726,000 |
| 11532466 |
Part-life estimation utilizing feature metrology |
Chien-Min Liao, Yao-Hung YANG, Siamak Salimian, Hsiu Yang, Chun-Chung Chen |
2022-12-20 |
$39,023,000 |
| 11398369 |
Method and apparatus for actively tuning a plasma power source |
Rongping Wang, Siamak Salimian |
2022-07-26 |
$63,545,000 |
| 11359722 |
Multinode multi-use O-ring and method for forming a seal |
Shagun P. Maheshwari, Yao-Hung YANG, King F. Lee, Andrew Yu, Aniruddha Pal +1 more |
2022-06-14 |
$21,647,000 |
| 11090893 |
Method of reclaiming a seal |
Shagun P. Maheshwari, Yao-Hung YANG, Yu-Chi Yeh, Andrew Yu, Aniruddha Pal +1 more |
2021-08-17 |
$63,158,000 |
| 11074426 |
Methods and systems for multi-part authentication and tracking |
Chien-Min Liao, Yao-Hung YANG, Hsiu Yang, Jeevan Shanbhag, Chun-Chung Chen |
2021-07-27 |
$132,720,000 |
| 11053581 |
Plasma erosion resistant rare-earth oxide based thin film coatings |
Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor |
2021-07-06 |
$60,527,000 |
| 10734202 |
Rare-earth oxide based erosion resistant coatings for semiconductor application |
Jennifer Y. Sun, Biraja P. Kanungo |
2020-08-04 |
$43,243,000 |
| 10727096 |
Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance |
Andrew Nguyen, Yogananda Sarode Vishwanath |
2020-07-28 |
$35,855,000 |
| 10685819 |
Measuring concentrations of radicals in semiconductor processing |
Ramesh Gopalan, George Alajajian, Michael J. Mark |
2020-06-16 |
$36,933,000 |
| 10672591 |
Apparatus for removing particles from a twin chamber processing system |
Andrew Nguyen, Kartik Ramaswamy, Yogananda Sarode Vishwanath |
2020-06-02 |
$65,790,000 |
| 10501843 |
Plasma erosion resistant rare-earth oxide based thin film coatings |
Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor |
2019-12-10 |
$14,920,000 |
| 10446418 |
Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance |
Andrew Nguyen, Yogananda Sarode Vishwanath |
2019-10-15 |
$25,920,000 |
| 10418229 |
Aerosol deposition coating for semiconductor chamber components |
Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang |
2019-09-17 |
$56,752,000 |
| 10347522 |
Method to remove residual charge on a electrostatic chuck during the de-chucking step |
Wendell Glen Boyd, Jr., Robert T. Hirahara |
2019-07-09 |
$20,979,000 |
| 10211033 |
Inline DPS chamber hardware are design to enable axis symmetry for improved flow conductance and uniformity |
Andrew Nguyen, Yogananda Sarode Vishwanath |
2019-02-19 |
$29,015,000 |
| 10119188 |
Plasma erosion resistant rare-earth oxide based thin film coatings |
Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor |
2018-11-06 |
$24,517,000 |
| 10010912 |
Particle reduction via throttle gate valve purge |
Jared Ahmad Lee, Dmitry Lubomirsky, Martin Jeff Salinas, Andrew Nguyen, Eric A. Englhardt +1 more |
2018-07-03 |
$29,604,000 |
| 9865434 |
Rare-earth oxide based erosion resistant coatings for semiconductor application |
Jennifer Y. Sun, Biraja P. Kanungo |
2018-01-09 |
$16,545,000 |
