Issued Patents All Time
Showing 25 most recent of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195839 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang | 2025-01-14 |
| 11856706 | Method and system for improving the operation of semiconductor processing | Hsui Yang, Yao-Hung YANG, Jeevan Shanbhag, Chien-Min Liao, Earl Hunter +4 more | 2023-12-26 |
| 11680308 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2023-06-20 |
| 11566318 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566317 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566319 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11560913 | Brazed joint and semiconductor processing chamber component having the same | Govinda Raj, Hamid Mohiuddin, Ian Widlow | 2023-01-24 |
| 11532466 | Part-life estimation utilizing feature metrology | Chien-Min Liao, Yao-Hung YANG, Siamak Salimian, Hsiu Yang, Chun-Chung Chen | 2022-12-20 |
| 11398369 | Method and apparatus for actively tuning a plasma power source | Rongping Wang, Siamak Salimian | 2022-07-26 |
| 11359722 | Multinode multi-use O-ring and method for forming a seal | Shagun P. Maheshwari, Yao-Hung YANG, King F. Lee, Andrew Yu, Aniruddha Pal +1 more | 2022-06-14 |
| 11090893 | Method of reclaiming a seal | Shagun P. Maheshwari, Yao-Hung YANG, Yu-Chi Yeh, Andrew Yu, Aniruddha Pal +1 more | 2021-08-17 |
| 11074426 | Methods and systems for multi-part authentication and tracking | Chien-Min Liao, Yao-Hung YANG, Hsiu Yang, Jeevan Shanbhag, Chun-Chung Chen | 2021-07-27 |
| 11053581 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2021-07-06 |
| 10734202 | Rare-earth oxide based erosion resistant coatings for semiconductor application | Jennifer Y. Sun, Biraja P. Kanungo | 2020-08-04 |
| 10727096 | Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance | Andrew Nguyen, Yogananda Sarode Vishwanath | 2020-07-28 |
| 10685819 | Measuring concentrations of radicals in semiconductor processing | Ramesh Gopalan, George Alajajian, Michael J. Mark | 2020-06-16 |
| 10672591 | Apparatus for removing particles from a twin chamber processing system | Andrew Nguyen, Kartik Ramaswamy, Yogananda Sarode Vishwanath | 2020-06-02 |
| 10501843 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2019-12-10 |
| 10446418 | Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance | Andrew Nguyen, Yogananda Sarode Vishwanath | 2019-10-15 |
| 10418229 | Aerosol deposition coating for semiconductor chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2019-09-17 |
| 10347522 | Method to remove residual charge on a electrostatic chuck during the de-chucking step | Wendell Glen Boyd, Jr., Robert T. Hirahara | 2019-07-09 |
| 10211033 | Inline DPS chamber hardware are design to enable axis symmetry for improved flow conductance and uniformity | Andrew Nguyen, Yogananda Sarode Vishwanath | 2019-02-19 |
| 10119188 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2018-11-06 |
| 10010912 | Particle reduction via throttle gate valve purge | Jared Ahmad Lee, Dmitry Lubomirsky, Martin Jeff Salinas, Andrew Nguyen, Eric A. Englhardt +1 more | 2018-07-03 |
| 9865434 | Rare-earth oxide based erosion resistant coatings for semiconductor application | Jennifer Y. Sun, Biraja P. Kanungo | 2018-01-09 |