Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431338 | Composite structures for semiconductor process chambers | Tianshu LI, Yikai Chen, Yao-Hung YANG, Saurabh M. Chaudhari | 2025-09-30 |
| D1027120 | Seal for an assembly in a vapor deposition chamber | Yao-Hung YANG, Eric Ruhland, Saurabh M. Chaudhari, Dien-Yeh Wu, Philip Wayne Nagle +4 more | 2024-05-14 |
| 11574831 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif | 2023-02-07 |
| 11359722 | Multinode multi-use O-ring and method for forming a seal | Shagun P. Maheshwari, Yao-Hung YANG, King F. Lee, Andrew Yu, Tom K. Cho +1 more | 2022-06-14 |
| 11177136 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif | 2021-11-16 |
| 11171008 | Abatement and strip process chamber in a dual load lock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif | 2021-11-09 |
| 11090893 | Method of reclaiming a seal | Shagun P. Maheshwari, Yao-Hung YANG, Tom K. Cho, Yu-Chi Yeh, Andrew Yu +1 more | 2021-08-17 |
| 10991552 | Cooling mechanism utilized in a plasma reactor with enhanced temperature regulation | Victor Calderon, Martin Jeffrey Salinas, Valentin N. Todorow | 2021-04-27 |
| 10468282 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeff Salinas, Paul B. Reuter, Imad Yousif | 2019-11-05 |
| 10453694 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif | 2019-10-22 |
| 10249475 | Cooling mechanism utlized in a plasma reactor with enhanced temperature regulation | Victor Calderon, Martin Jeffrey Salinas, Valentin N. Todorow | 2019-04-02 |
| 10204805 | Thin heated substrate support | Imad Yousif, Martin Jeffrey Salinas, Paul B. Reuter, Jared Ahmad Lee | 2019-02-12 |
| 10090181 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif | 2018-10-02 |
| 9947559 | Thermal management of edge ring in semiconductor processing | Martin Jeffrey Salinas, Dmitry Lubomirsky, Imad Yousif, Andrew Nguyen | 2018-04-17 |
| 8562742 | Apparatus for radial delivery of gas to a chamber and methods of use thereof | Jared Ahmad Lee, Martin Jeff Salinas, Ankur Agarwal, Ezra Robert Gold, James P. Cruse +1 more | 2013-10-22 |