Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094752 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan +2 more | 2024-09-17 |
| 11728141 | Gas hub for plasma reactor | Yan Rozenzon, Kyle Tantiwong, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2023-08-15 |
| 11574831 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal | 2023-02-07 |
| 11393710 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan +2 more | 2022-07-19 |
| 11244811 | Plasma reactor with highly symmetrical four-fold gas injection | Yan Rozenzon, Kyle Tantiwong, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2022-02-08 |
| 11177136 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal | 2021-11-16 |
| 11171008 | Abatement and strip process chamber in a dual load lock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal | 2021-11-09 |
| 11139150 | Nozzle for multi-zone gas injection assembly | Yan Rozenzon, Kyle Tantiwong, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2021-10-05 |
| 10825708 | Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability | Valentin N. Todorow, Samer Banna, Albert Wang, Gary Leray | 2020-11-03 |
| 10468282 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeff Salinas, Paul B. Reuter, Aniruddha Pal | 2019-11-05 |
| 10453694 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal | 2019-10-22 |
| 10410841 | Side gas injection kit for multi-zone gas injection assembly | Yan Rozenzon, Kyle Tantiwong, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2019-09-10 |
| 10204805 | Thin heated substrate support | Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal, Jared Ahmad Lee | 2019-02-12 |
| 10163606 | Plasma reactor with highly symmetrical four-fold gas injection | Yan Rozenzon, Kyle Tantiwong, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2018-12-25 |
| 10090181 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal | 2018-10-02 |
| 10008368 | Multi-zone gas injection assembly with azimuthal and radial distribution control | Yan Rozenzon, Kyle Tantiwong, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2018-06-26 |
| 9947559 | Thermal management of edge ring in semiconductor processing | Aniruddha Pal, Martin Jeffrey Salinas, Dmitry Lubomirsky, Andrew Nguyen | 2018-04-17 |
| 9464732 | Apparatus for uniform pumping within a substrate process chamber | Paul B. Reuter, Martin Jeffrey Salinas, Jared Ahmad Lee | 2016-10-11 |
| 9330887 | Plasma reactor with tiltable overhead RF inductive source | Kenneth S. Collins, Andrew Nguyen, Martin Jeffrey Salinas, Ming Xu | 2016-05-03 |
| 8988848 | Extended and independent RF powered cathode substrate for extreme edge tunability | Valentin N. Todorow, Samer Banna, Albert Wang, Gary Leray | 2015-03-24 |
| D699692 | Upper liner | — | 2014-02-18 |
| 8414736 | Plasma reactor with tiltable overhead RF inductive source | Kenneth S. Collins, Andrew Nguyen, Martin Jeffrey Salinas, Ming Xu | 2013-04-09 |
| 8329593 | Method and apparatus for removing polymer from the wafer backside and edge | Anchel Sheyner, Ajit Balakrishna, Nancy Fung, Ying Rui, Martin Jeffrey Salinas +2 more | 2012-12-11 |
| 8092605 | Magnetic confinement of a plasma | Steven C. Shannon, Masao Drexel, James A. Stinnett, Ying Rui, Ying Xiao +1 more | 2012-01-10 |
| 7967996 | Process for wafer backside polymer removal and wafer front side photoresist removal | Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Shahid Rauf, Ajit Balakrishna +6 more | 2011-06-28 |