Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770328 | Substrate support with symmetrical feed structure | Xing Lin, Douglas A. Buchberger, Jr., Xiaoping Zhou, Andrew Nguyen | 2020-09-08 |
| 10096494 | Substrate support with symmetrical feed structure | Xing Lin, Douglas A. Buchberger, Jr., Xiaoping Zhou, Andrew Nguyen | 2018-10-09 |
| 9123762 | Substrate support with symmetrical feed structure | Xing Lin, Douglas A. Buchberger, Jr., Xiaoping Zhou, Andrew Nguyen | 2015-09-01 |
| 8633423 | Methods and apparatus for controlling substrate temperature in a process chamber | Xing Lin, Douglas A. Buchberger, Jr., Xiaoping Zhou, Valentin N. Todorow, Andrew Nguyen | 2014-01-21 |
| 8360003 | Plasma reactor with uniform process rate distribution by improved RF ground return path | Andrew Nguyen, Hiroji Hanawa, Kartik Ramaswamy, Samer Banna, Valentin N. Todorow | 2013-01-29 |
| 8329593 | Method and apparatus for removing polymer from the wafer backside and edge | Imad Yousif, Ajit Balakrishna, Nancy Fung, Ying Rui, Martin Jeffrey Salinas +2 more | 2012-12-11 |
| 7879183 | Apparatus and method for front side protection during backside cleaning | Imad Yousif, Ying Rui, Nancy Fung, Martin Jeffrey Salinas, Ajit Balakrishna +2 more | 2011-02-01 |