| 11894220 |
Method and apparatus for controlling a processing reactor |
Michael Nichols, Tina Dhekial-Phukan, Venkata Ravishankar Kasibhotla, Sanggyum Kim |
2024-02-06 |
$39,056,000 |
| 11693053 |
Bode fingerprinting for characterizations and failure detections in processing chamber |
Tao Zhang, Upendra Ummethala |
2023-07-04 |
|
| 11486927 |
Bode fingerprinting for characterizations and failure detections in processing chamber |
Tao Zhang, Upendra Ummethala |
2022-11-01 |
$32,150,000 |
| 11315760 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2022-04-26 |
$43,127,000 |
| 11049699 |
Gas box for CVD chamber |
Tejas Ulavi, Amit Kumar BANSAL, Nitin Pathak |
2021-06-29 |
$47,858,000 |
| 10910238 |
Heater pedestal assembly for wide range temperature control |
Kaushik Alayavalli, Sanjeev Baluja, Amit Kumar BANSAL, Matthew J. Busche, Juan Carlos Rocha-Alvarez +3 more |
2021-02-02 |
$74,085,000 |
| 10770269 |
Apparatus and methods for reducing particles in semiconductor process chambers |
Andrew Nguyen, Bradley J. Howard, Shahid Rauf, Tom Choi, Kenneth S. Collins +3 more |
2020-09-08 |
$22,964,000 |
| 10612135 |
Method and system for high temperature clean |
Sanjeev Baluja, Kalyanjit Ghosh, Ren-Guan Duan, Mayur Govind Kulkarni, Gregory Siu +4 more |
2020-04-07 |
$24,481,000 |
| 10615006 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2020-04-07 |
$24,481,000 |
| 10580620 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2020-03-03 |
$21,905,000 |
| 10546728 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2020-01-28 |
$24,189,000 |
| 10535502 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2020-01-14 |
$50,821,000 |
| 10453656 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2019-10-22 |
$16,291,000 |
| 10131994 |
Inductively coupled plasma source with top coil over a ceiling and an independent side coil and independent air flow |
Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more |
2018-11-20 |
$33,309,000 |
| 9909213 |
Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors |
Sergio Fukuda Shoji, Hamid Noorbakhsh, Jong Mun Kim, Jason Della Rosa |
2018-03-06 |
$32,877,000 |
| 9896769 |
Inductively coupled plasma source with multiple dielectric windows and window-supporting structure |
Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more |
2018-02-20 |
$63,276,000 |
| 9761416 |
Apparatus and methods for reducing particles in semiconductor process chambers |
Andrew Nguyen, Bradley J. Howard, Shahid Rauf, Tom K. Cho, Kenneth S. Collins +3 more |
2017-09-12 |
$20,589,000 |
| 9745663 |
Symmetrical inductively coupled plasma source with symmetrical flow chamber |
Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more |
2017-08-29 |
$19,098,000 |
| 9741546 |
Symmetric plasma process chamber |
James D. Carducci, Hamid Tavassoli, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2017-08-22 |
$17,010,000 |
| 9449796 |
Plasma processing system including a symmetrical remote plasma source for minimal ion energy |
Ankur Agarwal, Rajinder Dhindsa |
2016-09-20 |
$12,933,000 |
| 9269546 |
Plasma reactor with electron beam plasma source having a uniform magnetic field |
Ming-Feng Wu, Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Nipun Misra |
2016-02-23 |
$9,765,000 |
| 9155134 |
Methods and apparatus for rapidly responsive heat control in plasma processing devices |
Chunlei Zhang, Richard Fovell, Ezra Robert Gold, James P. Cruse |
2015-10-06 |
$24,740,000 |
| 8980760 |
Methods and apparatus for controlling plasma in a process chamber |
Ankur Agarwal, Shahid Rauf |
2015-03-17 |
$8,353,000 |
| 8895889 |
Methods and apparatus for rapidly responsive heat control in plasma processing devices |
Chunlei Zhang, Richard Fovell, Ezra Robert Gold, James P. Cruse |
2014-11-25 |
$12,494,000 |
| 8894805 |
Electron beam plasma source with profiled magnet shield for uniform plasma generation |
Kallol Bera, Shahid Rauf, Leonid Dorf, Kenneth S. Collins, Gary Leray |
2014-11-25 |
$12,494,000 |
