| 11935724 |
Symmetric VHF source for a plasma reactor |
Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more |
2024-03-19 |
| 11587766 |
Symmetric VHF source for a plasma reactor |
Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more |
2023-02-21 |
| 11043361 |
Symmetric VHF source for a plasma reactor |
Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more |
2021-06-22 |
| 9824862 |
Symmetric VHF source for a plasma reactor |
Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more |
2017-11-21 |
| 9721760 |
Electron beam plasma source with reduced metal contamination |
Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Kartik Ramaswamy, Gonzalo Monroy +2 more |
2017-08-01 |
| 9653267 |
Temperature controlled chamber liner |
James D. Carducci, Kallol Bera, Larry D. Elizaga |
2017-05-16 |
| 9443700 |
Electron beam plasma source with segmented suppression electrode for uniform plasma generation |
Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci +1 more |
2016-09-13 |
| 9269546 |
Plasma reactor with electron beam plasma source having a uniform magnetic field |
Ming-Feng Wu, Ajit Balakrishna, Leonid Dorf, Shahid Rauf, Kenneth S. Collins |
2016-02-23 |
| 9129777 |
Electron beam plasma source with arrayed plasma sources for uniform plasma generation |
Leonid Dorf, Shahid Rauf, Kenneth S. Collins, James D. Carducci, Gary Leray +1 more |
2015-09-08 |
| 8951384 |
Electron beam plasma source with segmented beam dump for uniform plasma generation |
Leonid Dorf, Shahid Rauf, Kenneth S. Collins, James D. Carducci, Gary Leray +1 more |
2015-02-10 |
| 8920597 |
Symmetric VHF source for a plasma reactor |
Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more |
2014-12-30 |
| 8734664 |
Method of differential counter electrode tuning in an RF plasma reactor |
Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Douglas A. Buchberger, Jr. +1 more |
2014-05-27 |
| 7786024 |
Selective processing of semiconductor nanowires by polarized visible radiation |
David Stumbo, Yaoling Pan, Costas P. Grigoropoulos |
2010-08-31 |
