Issued Patents All Time
Showing 25 most recent of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228534 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Yaoling Pan, Kelvin Chan, Amir Bayati, Philip Allan Kraus +2 more | 2025-02-18 |
| 12224156 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Xiaopu Li, Jozef Kudela, Tsutomu Tanaka, Dmitry A. Dzilno | 2025-02-11 |
| 12142458 | Symmetric plasma source to generate pie-shaped treatment | Anantha K. Subramani, Farzad Houshmand, Philip Allan Kraus, Abhishek Chowdhury, John C. Forster | 2024-11-12 |
| 12020965 | Magnetic holding structures for plasma processing applications | Andrew Nguyen, Sathya Swaroop Ganta, Canfeng Lai | 2024-06-25 |
| 12002654 | Modular high-frequency source | Thai Cheng Chua, Christian Amormino, Hanh Nguyen, Philip Allan Kraus | 2024-06-04 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Sathya Swaroop Ganta, Andrew Nguyen, Jay D. Pinson, II, Akshay Dhanakshirur +6 more | 2024-05-14 |
| 11959868 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Yaoling Pan, Kelvin Chan, Amir Bayati, Philip Allan Kraus +2 more | 2024-04-16 |
| 11959174 | Shunt door for magnets in plasma process chamber | Sathya Swaroop Ganta, Timothy Joseph Franklin, Kaushik Alayavalli, Akshay Dhanakshirur, Stephen C. Garner +1 more | 2024-04-16 |
| 11908662 | Device and method for tuning plasma distribution using phase control | Xiaopu Li, Edward P. Hammond, IV, Jonghoon Baek, Amit Kumar BANSAL, Jun Ma +1 more | 2024-02-20 |
| 11823871 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Jozef Kudela, Tsutomu Tanaka, Alexander V. Garachtchenko, Dmitry A. Dzilno, Avinash Shervegar +3 more | 2023-11-21 |
| 11810810 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Joseph Yudovsky | 2023-11-07 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Jennifer Y. Sun, Philip Allan Kraus +6 more | 2023-02-14 |
| 11557501 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Joseph Yudovsky | 2023-01-17 |
| 11315769 | Plasma source for rotating susceptor | Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Farzad Houshmand, Hanhong Chen | 2022-04-26 |
| 11315763 | Shaped electrodes for improved plasma exposure from vertical plasma source | Dmitry A. Dzilno, Anantha K. Subramani, John C. Forster, Tsutomu Tanaka | 2022-04-26 |
| 11198939 | Recursive inject apparatus for improved distribution of gas | Aaron Miller | 2021-12-14 |
| 11189502 | Showerhead with interlaced gas feed and removal and methods of use | Shahid Rauf, James D. Carducci, Vladimir Knyazik, Anantha K. Subramani | 2021-11-30 |
| 11114284 | Plasma reactor with electrode array in ceiling | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Shahid Rauf | 2021-09-07 |
| 11081317 | Modular high-frequency source | Thai Cheng Chua, Christian Amormino, Hanh Nguyen, Philip Allan Kraus | 2021-08-03 |
| 10903056 | Plasma source for rotating susceptor | Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Farzad Houshmand, Hanhong Chen | 2021-01-26 |
| 10879042 | Symmetric plasma source to generate pie shaped treatment | Anantha K. Subramani, Farzad Houshmand, Philip Allan Kraus, Abhishek Chowdhury, John C. Forster | 2020-12-29 |
| 10763085 | Shaped electrodes for improved plasma exposure from vertical plasma source | Dmitry A. Dzilno, Anantha K. Subramani, John C. Forster, Tsutomu Tanaka | 2020-09-01 |
| 10685864 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Joseph Yudovsky | 2020-06-16 |
| 10633741 | Recursive inject apparatus for improved distribution of gas | Aaron Miller | 2020-04-28 |
| 10510515 | Processing tool with electrically switched electrode assembly | Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci, Michael R. Rice +1 more | 2019-12-17 |