Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Capacitive sensor for chamber condition monitoring

Capacitive sensor for chamber condition monitoring

US Patent 11581206 · Granted Feb 14, 2023

Estimated economic value: $35,617,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma chamber with gas cross-flow, microwave resonators and a rotatable pedesta2025
Halogen resistant coatings and methods of making and using thereof2025
Protective metal oxy-fluoride coatings2025
Method of metal oxide infiltration into photoresist2025
Chemical-dose substrate deposition monitoring2025
Molybdenum (0) precursors for deposition of molybdenum films2025
Process characterization and correction using optical wall process sensor (OWPS)2025
Dry etching with etch byproduct self-cleaning2025
Showerhead design to control stray deposition2025
Directional selective junction clean with field polymer protections2025
Atomic layer deposition coatings for high temperature ceramic components2025
Transmission corrected plasma emission using in-situ optical reflectometry2025