Issued Patents All Time
Showing 25 most recent of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Edric Tong, Anzhong Chang +10 more | 2025-08-26 |
| 12300474 | Semiconductor substrate support power transmission components | Jian Li, Katherine Woo, Matthew L. Miller, Shinnosuke Kawaguchi | 2025-05-13 |
| 12131934 | Semiconductor substrate support leveling apparatus | Katherine Woo, Jian Li, Shinnosuke Kawaguchi, David W. Groechel, Dorothea Buechel-Rimmel +4 more | 2024-10-29 |
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Diwakar Kedlaya, Satish Radhakrishnan, Anton Baryshnikov +3 more | 2024-08-13 |
| 12057339 | Bipolar electrostatic chuck to limit DC discharge | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Zheng John Ye | 2024-08-06 |
| 12040210 | Multi-pressure bipolar electrostatic chucking | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Akshay Gunaji, Mayur Govind Kulkarni +6 more | 2024-07-16 |
| 11859307 | Apparatus and methods for alignment of a susceptor | Edric Tong, James Francis Mack | 2024-01-02 |
| 11853042 | Part, sensor, and metrology data integration | Garrett H. Sin, Sidharth Bhatia, Katty Marie Lydia Gamon Guyomard, Shawyon Jafari, Heng-Cheng Pai +2 more | 2023-12-26 |
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Edric Tong, Anzhong Chang +10 more | 2023-12-19 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Edric Tong, Anzhong Chang +10 more | 2021-02-23 |
| 10883190 | Apparatus and methods for alignment of a susceptor | Edric Tong, James Francis Mack | 2021-01-05 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Joseph M. Ranish, Aaron Muir Hunter, Edric Tong, James Francis Mack, Kin Pong Lo +3 more | 2020-07-28 |
| 10458040 | Upper dome with injection assembly | Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack, Zhiyuan Ye +5 more | 2019-10-29 |
| 10306708 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield, Joseph M. Ranish +6 more | 2019-05-28 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more | 2019-04-23 |
| 10202707 | Substrate processing system with lamphead having temperature management | Joseph M. Ranish, Satheesh Kuppurao, Dongming Iu | 2019-02-12 |
| 10119192 | EPI base ring | Steve Aboagye, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao, Mehmet Tugrul Samir +1 more | 2018-11-06 |
| 10077508 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2018-09-18 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Edric Tong, Anzhong Chang +10 more | 2018-08-28 |
| 9870919 | Process chamber having separate process gas and purge gas regions | Joseph M. Ranish, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2018-01-16 |
| 9863043 | Window cooling using compliant material | Joseph M. Ranish | 2018-01-09 |
| 9845550 | Upper dome with injection assembly | Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack, Zhiyuan Ye +5 more | 2017-12-19 |
| 9842753 | Absorbing lamphead face | Joseph M. Ranish, Satheesh Kuppurao, Balasubramanian Ramachandran, Zuoming ZHU | 2017-12-12 |
| 9832816 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield, Joseph M. Ranish +6 more | 2017-11-28 |
| 9814099 | Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same | Shu-Kwan LAU, Joseph M. Ranish, Mehmet Tugrul Samir | 2017-11-07 |