Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421607 | Systems and methods for substrate support temperature control | Rui Cheng, Jian Li | 2025-09-23 |
| 12365986 | Remote capacitively coupled plasma deposition of amorphous silicon | Rui Cheng, Chen-An Chen, Karthik Janakiraman | 2025-07-22 |
| 12315746 | Bottom cover plate to reduce wafer planar nonuniformity | Srinivas Tokur Mohana, Sandesh Yadamane, Kai WU, Jallepally Ravi, Xiaozhou YU +1 more | 2025-05-27 |
| D1071886 | Substrate support for a substrate processing chamber | Zhixiu Liang, Michael S. Jackson, Jiang Lu, Cheng-Hsiung Tsai, Tomoharu Matsushita | 2025-04-22 |
| 12255054 | Methods to eliminate of deposition on wafer bevel and backside | Venkata Sharat Chandra Parimi, Manjunath Veerappa Chobari Patil, Nitin Pathak, Yi Yang, Badri Narayan Ramamurthi +3 more | 2025-03-18 |
| 12205818 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya +1 more | 2025-01-21 |
| 12062567 | Systems and methods for substrate support temperature control | Rui Cheng, Diwakar Kedlaya, Satish Radhakrishnan, Anton Baryshnikov, Venkatanarayana Shankaramurthy +3 more | 2024-08-13 |
| 11981998 | Systems and methods for substrate support temperature control | Rui Cheng, Jian Li | 2024-05-14 |
| 11961739 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya +1 more | 2024-04-16 |
| 11939668 | Gas delivery for tungsten-containing layer | Mohammed Jaheer SHERFUDEEN, David Santi, Jallepally Ravi, Peiqi WANG, Kai WU | 2024-03-26 |
| 11939675 | Apparatus and methods for improving thermal chemical vapor deposition (CVD) uniformity | Rui Cheng, Karthik Janakiraman | 2024-03-26 |
| D1009817 | Shadow ring lift pin | Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi, Harpreet Singh +1 more | 2024-01-02 |
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Jian Li, Satish Radhakrishnan, Rui Cheng, Diwakar Kedlaya +7 more | 2023-11-28 |
| 11798820 | Gas delivery systems and methods | Diwakar Kedlaya, Fang Ruan, Ganesh Balasubramanian, Kaushik Alayavalli, Martin Jay Seamons +3 more | 2023-10-24 |
| D997893 | Shadow ring lift plate | Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi, Harpreet Singh +1 more | 2023-09-05 |
| D997894 | Shadow ring lift assembly | Srinivas Tokur Mohana, Shreyas Patil Shanthaveeraswamy, Sandesh Yadamane, Jallepally Ravi, Harpreet Singh +1 more | 2023-09-05 |
| 11598004 | Lid assembly apparatus and methods for substrate processing chambers | Hanish Kumar Panavalappil Kumarankutty, Prashant A. DESAI, Diwakar Kedlaya, Sumit Agarwal, Vidyadharan Srinivasa Murthy Bangalore +1 more | 2023-03-07 |
| 11562902 | Hydrogen management in plasma deposited films | Rui Cheng, Diwakar Kedlaya, Karthik Janakiraman, Gautam K. Hemani, Krishna Nittala +4 more | 2023-01-24 |
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Aykut Aydin, Rui Cheng, Yi Yang, Diwakar Kedlaya +3 more | 2022-12-20 |
| 11527408 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya, Meenakshi GUPTA +5 more | 2022-12-13 |
| 11456173 | Methods for modifying photoresist profiles and tuning critical dimensions | Meenakshi GUPTA, Rui Cheng, Srinivas Guggilla, Karthik Janakiraman, Diwakar Kedlaya | 2022-09-27 |
| 11315787 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya, Meenakshi GUPTA +5 more | 2022-04-26 |
| 11009455 | Precursor delivery system and methods related thereto | Sarah White, Jonathan Bakke, Diwakar Kedlaya, Juan Carlos Rocha, Fang Ruan | 2021-05-18 |
| 10656100 | Surface acoustic wave sensors in semiconductor processing equipment | Ramesh Gopalan, Simon Yavelberg | 2020-05-19 |
| 10513008 | Chemical mechanical polishing smart ring | Stephen A. Wells, Ramesh Gopalan, Gangadhar Sheelavant, Simon Yavelberg | 2019-12-24 |