| 12033875 |
Wireless in-situ real-time measurement of electrostatic chucking force in semiconductor wafer processing |
— |
2024-07-09 |
| 11521839 |
Inline measurement of process gas dissociation using infrared absorption |
Siamak Salimian |
2022-12-06 |
| 11373890 |
Wireless in-situ real-time measurement of electrostatic chucking force in semiconductor wafer processing |
— |
2022-06-28 |
| 11355325 |
Methods and systems for monitoring input power for process control in semiconductor process systems |
Hemant P. Mungekar, Guomin Mao, Rongping Wang, Teryl Pratt |
2022-06-07 |
| 11114326 |
Substrate chucking and dechucking methods |
Wendell Glenn Boyd, Jr., Jim Zhongyi He, Robert T. Hirahara, Govinda Raj |
2021-09-07 |
| 11047035 |
Protective yttria coating for semiconductor equipment parts |
Yixing Lin, Tasnuva Tabassum, Siamak Salimian, Yikai Chen, Kevin A. PAPKE |
2021-06-29 |
| 10685819 |
Measuring concentrations of radicals in semiconductor processing |
Tom K. Cho, George Alajajian, Michael J. Mark |
2020-06-16 |
| 10656100 |
Surface acoustic wave sensors in semiconductor processing equipment |
Simon Yavelberg, Zubin Huang |
2020-05-19 |
| 10513008 |
Chemical mechanical polishing smart ring |
Zubin Huang, Stephen A. Wells, Gangadhar Sheelavant, Simon Yavelberg |
2019-12-24 |
| 10415251 |
Skylight with compound parabolic diffusers |
— |
2019-09-17 |
| 10094788 |
Surface acoustic wave sensors in semiconductor processing equipment |
Simon Yavelberg, Zubin Huang |
2018-10-09 |
| 7690966 |
Method and apparatus for detecting planarization of metal films prior to clearing |
Sridharan Srivatsan, Katgenhalli Y. Ramanujam, Tom Ni, Conan Chiang |
2010-04-06 |
| 7413988 |
Method and apparatus for detecting planarization of metal films prior to clearing |
Sridharan Srivatsan, Katgenhalli Y. Ramanujam, Tom Ni, Conan Chiang |
2008-08-19 |
| 7040952 |
Method for reducing or eliminating de-lamination of semiconductor wafer film layers during a chemical mechanical planarization process |
Sridharan Srivatsan, K. Y. Ramanujam |
2006-05-09 |
