Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8608851 | Plasma confinement apparatus, and method for confining a plasma | Jinyuan Chen, Qing Qian, Yuehong Fu, Zhaoyang Xu, Xusheng Zhou +1 more | 2013-12-17 |
| 7690966 | Method and apparatus for detecting planarization of metal films prior to clearing | Ramesh Gopalan, Sridharan Srivatsan, Katgenhalli Y. Ramanujam, Conan Chiang | 2010-04-06 |
| 7413988 | Method and apparatus for detecting planarization of metal films prior to clearing | Ramesh Gopalan, Sridharan Srivatsan, Katgenhalli Y. Ramanujam, Conan Chiang | 2008-08-19 |
| 6042687 | Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing | Vikram Singh, Brian McMillin, Michael Barnes, Richard Yang | 2000-03-28 |
| 6013155 | Gas injection system for plasma processing | Brian McMillin, Huong Nguyen, Michael Barnes | 2000-01-11 |