Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7690966 | Method and apparatus for detecting planarization of metal films prior to clearing | Ramesh Gopalan, Sridharan Srivatsan, Tom Ni, Conan Chiang | 2010-04-06 |
| 7413988 | Method and apparatus for detecting planarization of metal films prior to clearing | Ramesh Gopalan, Sridharan Srivatsan, Tom Ni, Conan Chiang | 2008-08-19 |
| 6896586 | Method and apparatus for heating polishing pad | Xuyen Pham, Tuan Nguyen, Ren Zhou, David Wei, Linda (Tong) Jiang +4 more | 2005-05-24 |