Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10643882 | Ceramic ring with a ladder structure | Zhi Chai, Shicai Fang | 2020-05-05 |
| 10497591 | Load lock chamber and the cluster tool system using the same | Ren Zhou, Brian Lu, Sean Chang, Shicai Fang, Jie Lian +1 more | 2019-12-03 |
| 10410909 | Waffer pedestal and support structure thereof | Ren Zhou, Shichai Fang | 2019-09-10 |
| 8783305 | Powder filling apparatus and methods for their use | Kyle Naydo, Derrick J. Parks, Patrick Reich, Gordon Stout, Michael Rocchio | 2014-07-22 |
| RE42942 | Powder filling apparatus and methods for their use | Gordon Stout, Michael Rocchio, Kyle Naydo, Derrick J. Parks, Patrick Reich | 2011-11-22 |
| 7228645 | Multi-zone shower head for drying single semiconductor substrate | — | 2007-06-12 |
| 7226055 | Substrate holding and spinning assembly and methods for making the same | Gregory R. Bettencourt, Anthony de la Llera | 2007-06-05 |
| 7054719 | System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system | Tuan Nguyen, Vien Quach, Ren Zhou | 2006-05-30 |
| 7040954 | Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishing | Simon McClatchie, Peter Norton, Ren Zhou | 2006-05-09 |
| 7040970 | Apparatus and method for distributing a polishing fluid | Simon McClatchie, Sabir A. Majumder, Ren Zhou, Tuan Nguyen | 2006-05-09 |
| 7018276 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Cangshan Xu, David Wei, Tony Luong | 2006-03-28 |
| 6953750 | Methods and systems for controlling belt surface temperature and slurry temperature in linear chemical mechanical planarization | Patrick P. Wu, Tuan Nguyen, Ren Zhou | 2005-10-11 |
| 6949016 | Gimballed conditioning apparatus | Anthony de la Llera | 2005-09-27 |
| 6939212 | Porous material air bearing platen for chemical mechanical planarization | — | 2005-09-06 |
| 6896600 | Liquid dispense manifold for chemical-mechanical polisher | Patrick P. Wu, Tony Luong | 2005-05-24 |
| 6896586 | Method and apparatus for heating polishing pad | Tuan Nguyen, Ren Zhou, David Wei, Linda (Tong) Jiang, Katgenhalli Y. Ramanujam +4 more | 2005-05-24 |
| 6872128 | System, method and apparatus for applying liquid to a CMP polishing pad | Ren Zhou, Wen-Chiang Tu | 2005-03-29 |
| 6869339 | Polishing pad and method of manufacture | — | 2005-03-22 |
| 6821195 | Carrier head having location optimized vacuum holes | Ren Zhou, Raisa Khavinson | 2004-11-23 |
| 6806100 | Molded end point detection window for chemical mechanical planarization | Cangshan Xu, Patrick P. Wu | 2004-10-19 |
| 6761626 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Cangshan Xu, David Wei, Tony Luong | 2004-07-13 |
| 6755723 | Polishing head assembly | — | 2004-06-29 |
| 6746313 | Polishing head assembly in an apparatus for chemical mechanical planarization | Anthony de la Llera | 2004-06-08 |
| 6732017 | System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system | Tuan Nguyen, Vien Quach, Ren Zhou | 2004-05-04 |
| 6712670 | Method and apparatus for applying downward force on wafer during CMP | Anthony de la Llera, Andrew Siu, Tuan Nguyen, Tony Luong | 2004-03-30 |