Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9314854 | Ductile mode drilling methods for brittle components of plasma processing apparatuses | Lihua Huang, Duane D. Scott, Joseph P. Doench, Jamie Burns, Emily P. Stenta +1 more | 2016-04-19 |
| 8796153 | Clamped monolithic showerhead electrode | Roger Patrick, Michael C. Kellogg | 2014-08-05 |
| 8536071 | Gasket with positioning feature for clamped monolithic showerhead electrode | Gautam Bhattacharyya, Simon Gosselin, Sandy Chao | 2013-09-17 |
| 8470127 | Cam-locked showerhead electrode and assembly | Anthony de la Llera, Pratik Mankidy, Rajlnder Dhindsa, Michael C. Kellogg, Roger Patrick | 2013-06-25 |
| 8419959 | Clamped monolithic showerhead electrode | Gautam Bhattacharyya, Simon Gosselin Eng., Sandy Chao, Anthony de la Llera, Pratik Mankidy | 2013-04-16 |
| 8414719 | Clamped monolithic showerhead electrode | Roger Patrick, Michael C. Kellogg | 2013-04-09 |
| 8272346 | Gasket with positioning feature for clamped monolithic showerhead electrode | Gautam Bhattacharyya, Simon Gosselin Eng, Sandy Chao | 2012-09-25 |
| 8221582 | Clamped monolithic showerhead electrode | Roger Patrick, Michael C. Kellogg | 2012-07-17 |
| 8084375 | Hot edge ring with sloped upper surface | Akira Koshiishi, Sathya Mani, Gautam Bhattacharyya, Sandy Chao | 2011-12-27 |
| 7226055 | Substrate holding and spinning assembly and methods for making the same | Anthony de la Llera, Xuyen Pham | 2007-06-05 |
| 5164065 | Non-breakable, electrically insulating sample well inserts for slab electrophoresis | George Fernwood, Efrem G. Hernandez, Lin Crawforth | 1992-11-17 |