Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437400 | Insulated dielectric window assembly of an inductively coupled plasma processing apparatus | David Setton, Brett C. Richardson | 2016-09-06 |
| 8536071 | Gasket with positioning feature for clamped monolithic showerhead electrode | Gregory R. Bettencourt, Simon Gosselin, Sandy Chao | 2013-09-17 |
| 8419959 | Clamped monolithic showerhead electrode | Gregory R. Bettencourt, Simon Gosselin Eng., Sandy Chao, Anthony de la Llera, Pratik Mankidy | 2013-04-16 |
| 8272346 | Gasket with positioning feature for clamped monolithic showerhead electrode | Gregory R. Bettencourt, Simon Gosselin Eng, Sandy Chao | 2012-09-25 |
| 8084375 | Hot edge ring with sloped upper surface | Akira Koshiishi, Sathya Mani, Gregory R. Bettencourt, Sandy Chao | 2011-12-27 |