Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387916 | Magnetic field control system | Alecia Chantalle Griffin, Peter Bradley Phillips, Bing Ji | 2025-08-12 |
| 12139791 | Showerhead faceplates with angled gas distribution passages for semiconductor processing tools | Pratik Mankidy, John Holland, Rajesh Dorai | 2024-11-12 |
| 11594400 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more | 2023-02-28 |
| 10262834 | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly | Pratik Mankidy | 2019-04-16 |
| 9263240 | Dual zone temperature control of upper electrodes | Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Lumin Li, Sang Ki Nam +5 more | 2016-02-16 |
| 9245716 | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly | Pratik Mankidy | 2016-01-26 |
| 9111731 | Gas feed insert in a plasma processing chamber and methods therefor | Michael C. Kellogg, Alexei Marakhtanov, Rajinder Dhindsa | 2015-08-18 |
| 9093483 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2015-07-28 |
| 9076826 | Plasma confinement ring assembly for plasma processing chambers | David Carman, Travis R. Taylor, Saurabh Ullal, Harmeet Singh | 2015-07-07 |
| 8847495 | Movable grounding arrangements in a plasma processing chamber and methods therefor | Michael C. Kellogg, Alexei Marakhtanov, Rajinder Dhindsa | 2014-09-30 |
| 8709202 | Upper electrode backing member with particle reducing features | Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2014-04-29 |
| 8702866 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2014-04-22 |
| 8628268 | Cam lock electrode clamp | Michael C. Kellogg, Anthony J. Norell, Rajinder Dhindsa | 2014-01-14 |
| 8573152 | Showerhead electrode | Pratik Mankidy, Michael C. Kellogg, Rajinder Dhindsa | 2013-11-05 |
| 8470127 | Cam-locked showerhead electrode and assembly | Pratik Mankidy, Rajlnder Dhindsa, Michael C. Kellogg, Gregory R. Bettencourt, Roger Patrick | 2013-06-25 |
| 8419959 | Clamped monolithic showerhead electrode | Gregory R. Bettencourt, Gautam Bhattacharyya, Simon Gosselin Eng., Sandy Chao, Pratik Mankidy | 2013-04-16 |
| 8402918 | Showerhead electrode with centering feature | Babak Kadkhodayan | 2013-03-26 |
| 8313665 | Showerhead electrode assemblies for plasma processing apparatuses | Thomas R. Stevenson, Saurabh Ullal | 2012-11-20 |
| 8313805 | Clamped showerhead electrode assembly | Babak Kadkhodayan, Rajinder Dhindsa, Michael C. Kellogg | 2012-11-20 |
| 8206506 | Showerhead electrode | Babak Kadkhodayan, Rajinder Dhindsa, Michael C. Kellogg | 2012-06-26 |
| 8161906 | Clamped showerhead electrode assembly | Babak Kadkhodayan, Rajinder Dhindsa, Michael C. Kellogg | 2012-04-24 |
| 7854820 | Upper electrode backing member with particle reducing features | Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2010-12-21 |
| 7226055 | Substrate holding and spinning assembly and methods for making the same | Gregory R. Bettencourt, Xuyen Pham | 2007-06-05 |
| 7018276 | Air platen for leading edge and trailing edge control | Xuyen Pham, Cangshan Xu, David Wei, Tony Luong | 2006-03-28 |
| 6949016 | Gimballed conditioning apparatus | Xuyen Pham | 2005-09-27 |