Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12311447 | Process for producing spheroidized powder from feedstock materials | John Barnes, Aaron Bent, Kamal Hadidi, Makhlouf Redjdal, Scott Joseph Turchetti +2 more | 2025-05-27 |
| 12261023 | Microwave plasma apparatus and methods for processing materials using an interior liner | Richard K. Holman | 2025-03-25 |
| 11471941 | Process for producing spheroidized powder from feedstock materials | John Barnes, Aaron Bent, Kamal Hadidi, Makhlouf Redjdal, Scott Joseph Turchetti +2 more | 2022-10-18 |
| 11465201 | Process for producing spheroidized powder from feedstock materials | John Barnes, Aaron Bent, Kamal Hadidi, Makhlouf Redjdal, Scott Joseph Turchetti +2 more | 2022-10-11 |
| 11273491 | Process for producing spheroidized powder from feedstock materials | John Barnes, Aaron Bent, Kamal Hadidi, Makhlouf Redjdal, Scott Joseph Turchetti +2 more | 2022-03-15 |
| 10639712 | Process for producing spheroidized powder from feedstock materials | John Barnes, Aaron Bent, Kamal Hadidi, Makhlouf Redjdal, Scott Joseph Turchetti +2 more | 2020-05-05 |
| 9728429 | Parasitic plasma prevention in plasma processing chambers | Anthony J. Ricci, Larry D. Martinez | 2017-08-08 |
| 9093483 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more | 2015-07-28 |
| 9082805 | System and method for testing an electrostatic chuck | Hong Shih, Tuochuan Huang, Yan Fang, Jon McChesney | 2015-07-14 |
| 9076826 | Plasma confinement ring assembly for plasma processing chambers | Anthony de la Llera, David Carman, Travis R. Taylor, Harmeet Singh | 2015-07-07 |
| 8797705 | Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential | John C. Valcore, Jr., Daniel Sang Byun, Ed Santos, Konstantin Makhratchev | 2014-08-05 |
| 8709202 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more | 2014-04-29 |
| 8702866 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more | 2014-04-22 |
| 8410393 | Apparatus and method for temperature control of a semiconductor substrate support | Anthony J. Ricci, Michael Kang, Matthew Busche | 2013-04-02 |
| 8313665 | Showerhead electrode assemblies for plasma processing apparatuses | Thomas R. Stevenson, Anthony de la Llera | 2012-11-20 |
| 8143904 | System and method for testing an electrostatic chuck | Hong Shih, Tuochuan Huang, Yan Fang, Jon McChesney | 2012-03-27 |
| 7939778 | Plasma processing chamber with guard ring for upper electrode assembly | Dean J. Larson, Daniel Arthur Brown | 2011-05-10 |
| 7862682 | Showerhead electrode assemblies for plasma processing apparatuses | Thomas R. Stevenson, Anthony de le Llera | 2011-01-04 |
| 7854820 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more | 2010-12-21 |
| 7767584 | In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control | Harmeet Singh, Shibu Gangadharan | 2010-08-03 |
| 7682980 | Method to improve profile control and N/P loading in dual doped gate applications | Helene Del Puppo, Frank Y. Lin, Chris Lee, Vahid Vahedi, Thomas A. Kamp +2 more | 2010-03-23 |
| 7482550 | Quartz guard ring | Dean J. Larson, Daniel Arthur Brown | 2009-01-27 |
| 7204913 | In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control | Harmeet Singh, Shibu Gangadharan | 2007-04-17 |
| 7186661 | Method to improve profile control and N/P loading in dual doped gate applications | Helene Del Puppo, Frank Y. Lin, Chris Lee, Vahid Vahedi, Thomas A. Kamp +2 more | 2007-03-06 |
| 6994769 | In-situ cleaning of a polymer coated plasma processing chamber | Harmeet Singh, John Daugherty, Vahid Vahedi | 2006-02-07 |