Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10366865 | Gas distribution system for ceramic showerhead of plasma etch reactor | Alex Paterson | 2019-07-30 |
| 9934979 | Gas distribution showerhead for inductively coupled plasma etch reactor | Alex Paterson, Ian Kenworthy | 2018-04-03 |
| 9613834 | Replaceable upper chamber section of plasma processing apparatus | Leonard J. Sharpless, Harmeet Singh | 2017-04-04 |
| 9245717 | Gas distribution system for ceramic showerhead of plasma etch reactor | Alex Paterson | 2016-01-26 |
| 9099398 | Gas distribution showerhead for inductively coupled plasma etch reactor | Alex Paterson, Ian Kenworthy | 2015-08-04 |
| 8970114 | Temperature controlled window of a plasma processing chamber component | Matt Busche, Adam Mace, Allan K. Ronne | 2015-03-03 |
| 8859432 | Bare aluminum baffles for resist stripping chambers | Fred Dennis Egley, Anthony Chen, Jack Kuo, Hong Shih, Duane Outka +1 more | 2014-10-14 |
| 8845856 | Edge ring assembly for plasma etching chambers | Michael C. Kellogg, Miguel Saldana, Travis R. Taylor | 2014-09-30 |
| 8562785 | Gas distribution showerhead for inductively coupled plasma etch reactor | Alex Paterson, Ian Kenworthy | 2013-10-22 |
| 8410393 | Apparatus and method for temperature control of a semiconductor substrate support | Anthony J. Ricci, Saurabh Ullal, Matthew Busche | 2013-04-02 |
| 8313635 | Bare aluminum baffles for resist stripping chambers | Fred Dennis Egley, Anthony Chen, Jack Kuo, Hong Shih, Duane Outka +1 more | 2012-11-20 |
| 7811409 | Bare aluminum baffles for resist stripping chambers | Fred Dennis Egley, Anthony Chen, Jack Kuo, Hong Shih, Duane Outka +1 more | 2010-10-12 |