Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985078 | Sensor and adjuster for a consumable | — | 2021-04-20 |
| 10665435 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2020-05-26 |
| 10395902 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2019-08-27 |
| 10332729 | Compression member for use in showerhead electrode assembly | Darrell Ehrlich, Daniel Arthur Brown | 2019-06-25 |
| 10074521 | Replaceable upper chamber parts of plasma processing apparatus | Daniel Arthur Brown, Jeffrey Bogart | 2018-09-11 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2018-08-14 |
| 9934979 | Gas distribution showerhead for inductively coupled plasma etch reactor | Michael Kang, Alex Paterson | 2018-04-03 |
| 9922804 | Compression member for use in showerhead electrode assembly | Darrell Ehrlich, Daniel Arthur Brown | 2018-03-20 |
| 9689533 | Coating method for gas delivery system | Duane Outka, Fangli Hao, Leonard J. Sharpless, Yijun Du | 2017-06-27 |
| 9099398 | Gas distribution showerhead for inductively coupled plasma etch reactor | Michael Kang, Alex Paterson | 2015-08-04 |
| 9076634 | Replaceable upper chamber parts of plasma processing apparatus | Daniel Arthur Brown, Jeff A. Bogart | 2015-07-07 |
| 9058960 | Compression member for use in showerhead electrode assembly | Darrell Ehrlich, Daniel Arthur Brown | 2015-06-16 |
| 8852685 | Coating method for gas delivery system | Duane Outka, Fangli Hao, Leonard J. Sharpless, Yijun Du | 2014-10-07 |
| 8562785 | Gas distribution showerhead for inductively coupled plasma etch reactor | Michael Kang, Alex Paterson | 2013-10-22 |
| 8469368 | Edge rings for electrostatic chucks | Kelly Fong, Michael C. Kellogg | 2013-06-25 |
| 8282987 | Aluminum-plated components of semiconductor material and methods of manufacturing the components | Kelly Fong, Leonard J. Sharpless | 2012-10-09 |
| 8128750 | Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components | Kelly Fong, Leonard J. Sharpless | 2012-03-06 |