Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984296 | Substrate support with improved process uniformity | Yuehong Fu, Zhigang Chen | 2024-05-14 |
| 10910195 | Substrate support with improved process uniformity | Yuehong Fu, Zhigang Chen | 2021-02-02 |
| 10741425 | Helium plug design to reduce arcing | Yuehong Fu, Zhigang Chen | 2020-08-11 |
| 10460978 | Boltless substrate support assembly | Yuehong Fu, Zhigang Chen | 2019-10-29 |
| 10262887 | Pin lifter assembly with small gap | Yuehong Fu | 2019-04-16 |
| 9689533 | Coating method for gas delivery system | Ian Kenworthy, Duane Outka, Leonard J. Sharpless, Yijun Du | 2017-06-27 |
| 9011602 | Pin lifting system | — | 2015-04-21 |
| 8854451 | Automated bubble detection apparatus and method | Josh Cormier, Hong Shih, Tuochuan Huang, John Daugherty, Allan K. Ronne +1 more | 2014-10-07 |
| 8852685 | Coating method for gas delivery system | Ian Kenworthy, Duane Outka, Leonard J. Sharpless, Yijun Du | 2014-10-07 |
| 7685965 | Apparatus for shielding process chamber port | John Daugherty, Allan K. Ronne | 2010-03-30 |
| 7524397 | Lower electrode design for higher uniformity | Albert R. Ellingboe, Eric H. Lenz | 2009-04-28 |
| 7234222 | Methods and apparatus for optimizing the delivery of a set of gases in a plasma processing system | John Daugherty | 2007-06-26 |
| 6949204 | Deformation reduction at the main chamber | Eric H. Lenz, Albert R. Ellingboe | 2005-09-27 |
| 6922867 | Two position robot design for FOUP purge | — | 2005-08-02 |
| 6889627 | Symmetrical semiconductor reactor | — | 2005-05-10 |
| 6863784 | Linear drive system for use in a plasma processing system | Keith Dawson, Eric H. Lenz | 2005-03-08 |
| 6712929 | Deformation reduction at the main chamber | Eric H. Lenz, Albert R. Ellingboe | 2004-03-30 |
| 6669811 | Linear drive system for use in a plasma processing system | Keith Dawson, Eric H. Lenz | 2003-12-30 |
| 6536777 | Sealing techniques suitable for different geometries and constrained spaces | Eric H. Lenz, Keith Dawson | 2003-03-25 |
| 6528949 | Apparatus for elimination of plasma lighting inside a gas line in a strong RF field | — | 2003-03-04 |
| 6481723 | Lift pin impact management | Dean J. Larson | 2002-11-19 |
| 6432831 | Gas distribution apparatus for semiconductor processing | Rajinder Dhindsa, Eric H. Lenz | 2002-08-13 |
| 6433484 | Wafer area pressure control | Eric H. Lenz, Bruno Morel | 2002-08-13 |
| 6415736 | Gas distribution apparatus for semiconductor processing | Rajinder Dhindsa | 2002-07-09 |
| 6363882 | Lower electrode design for higher uniformity | Albert R. Ellingboe, Eric H. Lenz | 2002-04-02 |