Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342163 | Variable depth edge ring for etch uniformity control | Ivelin Angelov, Cristian Siladie, Brian Severson | 2022-05-24 |
| 10651015 | Variable depth edge ring for etch uniformity control | Ivelin Angelov, Cristian Siladie, Brian Severson | 2020-05-12 |
| 9859145 | Cooled pin lifter paddle for semiconductor substrate processing apparatus | Andreas Fischer | 2018-01-02 |
| 9484243 | Processing chamber with features from side wall | Jason Augustino, Andreas Fischer, Andre DESEPTE, Harmeet Singh | 2016-11-01 |
| 9234775 | Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber | Robert C. Hefty, James V. Tietz, William S. Kennedy, Eric H. Lenz, William M. Denty, Jr. +1 more | 2016-01-12 |
| 9151408 | Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture | James Alan Woodward | 2015-10-06 |
| 9028646 | Film adhesive for semiconductor vacuum processing apparatus | Tom Stevenson, Victor Wang | 2015-05-12 |
| 8801892 | Uniform etch system | Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen, Xingcai Su +2 more | 2014-08-12 |
| 8772171 | Gas switching section including valves having different flow coefficients for gas distribution system | — | 2014-07-08 |
| 8701268 | Composite showerhead electrode assembly for a plasma processing apparatus | Tom Stevenson, Victor Wang | 2014-04-22 |
| 8545639 | Method of cleaning aluminum plasma chamber parts | Hong Shih, John Daugherty, Tuochuan Huang, Armen Avoyan, Jeremy Chang +5 more | 2013-10-01 |
| 8449786 | Film adhesive for semiconductor vacuum processing apparatus | Tom Stevenson, Victor Wang | 2013-05-28 |
| 8418649 | Composite showerhead electrode assembly for a plasma processing apparatus | Tom Stevenson, Victor Wang | 2013-04-16 |
| 8313611 | Gas switching section including valves having different flow coefficients for gas distribution system | — | 2012-11-20 |
| 8088248 | Gas switching section including valves having different flow coefficients for gas distribution system | — | 2012-01-03 |
| 8084705 | Quartz guard ring centering features | Daniel Arthur Brown, Keith Comendant, Victor Wang | 2011-12-27 |
| 7939778 | Plasma processing chamber with guard ring for upper electrode assembly | Daniel Arthur Brown, Saurabh Ullal | 2011-05-10 |
| 7875824 | Quartz guard ring centering features | Daniel Arthur Brown, Keith Comendant, Victor Wang | 2011-01-25 |
| 7482550 | Quartz guard ring | Daniel Arthur Brown, Saurabh Ullal | 2009-01-27 |
| 7371332 | Uniform etch system | Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen, Xingcai Su +2 more | 2008-05-13 |
| 7169231 | Gas distribution system with tuning gas | Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen, Xingcai Su +2 more | 2007-01-30 |
| 6481723 | Lift pin impact management | Fangli Hao | 2002-11-19 |
| 6364762 | Wafer atmospheric transport module having a controlled mini-environment | Farro Kaveh, David Jacob, Martin Robert Maraschin | 2002-04-02 |
| 6263542 | Tolerance resistant and vacuum compliant door hinge with open-assist feature | Thomas Sutton | 2001-07-24 |