| 11342163 |
Variable depth edge ring for etch uniformity control |
Ivelin Angelov, Cristian Siladie, Brian Severson |
2022-05-24 |
| 10651015 |
Variable depth edge ring for etch uniformity control |
Ivelin Angelov, Cristian Siladie, Brian Severson |
2020-05-12 |
| 9859145 |
Cooled pin lifter paddle for semiconductor substrate processing apparatus |
Andreas Fischer |
2018-01-02 |
| 9484243 |
Processing chamber with features from side wall |
Jason Augustino, Andreas Fischer, Andre DESEPTE, Harmeet Singh |
2016-11-01 |
| 9234775 |
Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber |
Robert C. Hefty, James V. Tietz, William S. Kennedy, Eric H. Lenz, William M. Denty, Jr. +1 more |
2016-01-12 |
| 9151408 |
Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture |
James Alan Woodward |
2015-10-06 |
| 9028646 |
Film adhesive for semiconductor vacuum processing apparatus |
Tom Stevenson, Victor Wang |
2015-05-12 |
| 8801892 |
Uniform etch system |
Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen, Xingcai Su +2 more |
2014-08-12 |
| 8772171 |
Gas switching section including valves having different flow coefficients for gas distribution system |
— |
2014-07-08 |
| 8701268 |
Composite showerhead electrode assembly for a plasma processing apparatus |
Tom Stevenson, Victor Wang |
2014-04-22 |
| 8545639 |
Method of cleaning aluminum plasma chamber parts |
Hong Shih, John Daugherty, Tuochuan Huang, Armen Avoyan, Jeremy Chang +5 more |
2013-10-01 |
| 8449786 |
Film adhesive for semiconductor vacuum processing apparatus |
Tom Stevenson, Victor Wang |
2013-05-28 |
| 8418649 |
Composite showerhead electrode assembly for a plasma processing apparatus |
Tom Stevenson, Victor Wang |
2013-04-16 |
| 8313611 |
Gas switching section including valves having different flow coefficients for gas distribution system |
— |
2012-11-20 |
| 8088248 |
Gas switching section including valves having different flow coefficients for gas distribution system |
— |
2012-01-03 |
| 8084705 |
Quartz guard ring centering features |
Daniel Arthur Brown, Keith Comendant, Victor Wang |
2011-12-27 |
| 7939778 |
Plasma processing chamber with guard ring for upper electrode assembly |
Daniel Arthur Brown, Saurabh Ullal |
2011-05-10 |
| 7875824 |
Quartz guard ring centering features |
Daniel Arthur Brown, Keith Comendant, Victor Wang |
2011-01-25 |
| 7482550 |
Quartz guard ring |
Daniel Arthur Brown, Saurabh Ullal |
2009-01-27 |
| 7371332 |
Uniform etch system |
Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen, Xingcai Su +2 more |
2008-05-13 |
| 7169231 |
Gas distribution system with tuning gas |
Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen, Xingcai Su +2 more |
2007-01-30 |
| 6481723 |
Lift pin impact management |
Fangli Hao |
2002-11-19 |
| 6364762 |
Wafer atmospheric transport module having a controlled mini-environment |
Farro Kaveh, David Jacob, Martin Robert Maraschin |
2002-04-02 |
| 6263542 |
Tolerance resistant and vacuum compliant door hinge with open-assist feature |
Thomas Sutton |
2001-07-24 |
