Issued Patents All Time
Showing 25 most recent of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340989 | Electrostatic edge ring mounting system for substrate processing | Alexander Matyushkin, Adam Mace, Darrell Ehrlich, John Holland, Felix Kozakevich +1 more | 2025-06-24 |
| 12237201 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Alexander Matyushkin, John Holland | 2025-02-25 |
| 11942351 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Alexander Matyushkin, John Holland | 2024-03-26 |
| 11664262 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Alexander Matyushkin, John Holland | 2023-05-30 |
| 11302556 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, James E. Tappan | 2022-04-12 |
| 10804129 | Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode | Christopher Kimball, Keith Gaff, Alexander Matyushkin, Zhigang Chen | 2020-10-13 |
| 10770363 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Ralph Jan-Pin Lu, Paul Gordon Robertson, Eric A. Pape +1 more | 2020-09-08 |
| 10720346 | Substrate support with thermal zones for semiconductor processing | Harmeet Singh, Keith Gaff, Neil Benjamin | 2020-07-21 |
| 10636689 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, James E. Tappan | 2020-04-28 |
| 10236193 | Substrate supports with multi-layer structure including independent operated heater zones | Harmeet Singh, Keith Gaff, Neil Benjamin | 2019-03-19 |
| 10056225 | Adjusting substrate temperature to improve CD uniformity | Keith Gaff, Harmeet Singh, Vahid Vahedi | 2018-08-21 |
| 10049948 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Ralph Jan-Pin Lu, Paul Gordon Robertson, Eric A. Pape +1 more | 2018-08-14 |
| 10002782 | ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough | Christopher Kimball, Keith Gaff, Alexander Matyushkin, Zhigang Chen | 2018-06-19 |
| 9646861 | Heating plate with heating zones for substrate processing and method of use thereof | Harmeet Singh, Keith Gaff, Neil Benjamin | 2017-05-09 |
| 9608550 | Lightup prevention using multi-layer ceramic fabrication techniques | — | 2017-03-28 |
| 9392643 | Heating plate with planar heater zones for semiconductor processing | Harmeet Singh, Keith Gaff, Neil Benjamin | 2016-07-12 |
| 9322795 | Electrode for use in measuring dielectric properties of parts | Jaehyun Kim, Arthur H. Sato, Qing Liu, Feiyang Wu | 2016-04-26 |
| 9318349 | Plasma chamber top piece assembly | Leonard J. Sharpless | 2016-04-19 |
| 9093483 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more | 2015-07-28 |
| 8884194 | Heating plate with planar heater zones for semiconductor processing | Harmeet Singh, Keith Gaff, Neil Benjamin | 2014-11-11 |
| 8821639 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, James E. Tappan | 2014-09-02 |
| 8735298 | Method for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, James E. Tappan | 2014-05-27 |
| 8709202 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more | 2014-04-29 |
| 8702866 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more | 2014-04-22 |
| 8642480 | Adjusting substrate temperature to improve CD uniformity | Keith Gaff, Harmeet Singh, Vahid Vahedi | 2014-02-04 |