Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387909 | Low frequency RF generator and associated electrostatic chuck | Alexei Marakhtanov, Felix Kozakevich, Bing Ji, Ranadeep Bhowmick, John Holland | 2025-08-12 |
| 12381105 | Coolant channel with internal fins for substrate processing pedestals | Feng Wang, Darrell Ehrlich, Eric SAMULON | 2025-08-05 |
| 12340989 | Electrostatic edge ring mounting system for substrate processing | Keith Comendant, Adam Mace, Darrell Ehrlich, John Holland, Felix Kozakevich +1 more | 2025-06-24 |
| 12237201 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Keith Comendant, John Holland | 2025-02-25 |
| 11942351 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Keith Comendant, John Holland | 2024-03-26 |
| 11664262 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Keith Comendant, John Holland | 2023-05-30 |
| 11651991 | Electrostatic Chuck design for cooling-gas light-up prevention | Alexei Marakhtanov, John Holland, Keith Gaff, Felix Kozakevich | 2023-05-16 |
| 11069553 | Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity | John Holland, Harmeet Singh, Alexei Marakhtanov, Keith Gaff, Zhigang Chen +1 more | 2021-07-20 |
| 11024532 | Electrostatic chuck design for cooling-gas light-up prevention | Alexei Marakhtanov, John Holland, Keith Gaff, Felix Kozakevich | 2021-06-01 |
| 10804129 | Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode | Christopher Kimball, Keith Gaff, Zhigang Chen, Keith Comendant | 2020-10-13 |
| 10257887 | Substrate support assembly | Dan Katz, John Holland, Theodoros Panagopoulos, Michael D. Willwerth | 2019-04-09 |
| 10083853 | Electrostatic chuck design for cooling-gas light-up prevention | Alexei Marakhtanov, John Holland, Keith Gaff, Felix Kozakevich | 2018-09-25 |
| 10002782 | ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough | Christopher Kimball, Keith Gaff, Zhigang Chen, Keith Comendant | 2018-06-19 |
| 9883549 | Substrate support assembly having rapid temperature control | Dan Katz, John Holland, Theodoros Panagopoulos, Michael D. Willwerth | 2018-01-30 |
| 9275887 | Substrate processing with rapid temperature gradient control | Dan Katz, John Holland, Theodoros Panagopoulos, Michael D. Willwerth | 2016-03-01 |
| 8663391 | Electrostatic chuck having a plurality of heater coils | Dennis Koosau, Theodoros Panagopoulos, John Holland | 2014-03-04 |
| 8226769 | Substrate support with electrostatic chuck having dual temperature zones | Dennis Koosau, Theodoros Panagopoulos, John Holland | 2012-07-24 |
| 7846254 | Heat transfer assembly | Boris Yendler | 2010-12-07 |
| 7780864 | Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution | Alexander Paterson, Valentin N. Todorow, Theodoros Panagopoulos, Brian K. Hatcher, Dan Katz +2 more | 2010-08-24 |
| 7727413 | Dual plasma source process using a variable frequency capacitively coupled source to control plasma ion density | Alexander Paterson, Valentin N. Todorow, Theodoros Panagopoulos, Brian K. Hatcher, Dan Katz +2 more | 2010-06-01 |
| 7645357 | Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency | Alexander Paterson, Valentin N. Todorow, Theodoros Panagopoulos, Brian K. Hatcher, Dan Katz +2 more | 2010-01-12 |
| 7436645 | Method and apparatus for controlling temperature of a substrate | John Holland, Theodoros Panagopoulos, Dan Katz, Michael F. Hegarty, Denis M. Koosau +1 more | 2008-10-14 |
| 7264688 | Plasma reactor apparatus with independent capacitive and toroidal plasma sources | Alexander Paterson, Valentin N. Todorow, Theodoros Panagopoulos, Brian K. Hatcher, Dan Katz +2 more | 2007-09-04 |