MH

Michael F. Hegarty

Applied Materials: 1 patents #4,780 of 7,310Top 70%
Overall (All Time): #3,367,463 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7436645 Method and apparatus for controlling temperature of a substrate John Holland, Theodoros Panagopoulos, Alexander Matyushkin, Dan Katz, Denis M. Koosau +1 more 2008-10-14