Issued Patents All Time
Showing 25 most recent of 128 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412736 | Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication process | Leonid Belau, Alexei Marakhtanov, Eric A. Hudson | 2025-09-09 |
| 12387909 | Low frequency RF generator and associated electrostatic chuck | Alexei Marakhtanov, Felix Kozakevich, Bing Ji, Ranadeep Bhowmick, Alexander Matyushkin | 2025-08-12 |
| 12362159 | Systems and methods for controlling a plasma sheath characteristic | Alexei Marakhtanov, James Eugene Caron, Felix Kozakevich, Ranadeep Bhowmick, Bing Ji | 2025-07-15 |
| 12354840 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, Felix Kozakevich, Bing Ji, Alexei Marakhtanov | 2025-07-08 |
| 12340989 | Electrostatic edge ring mounting system for substrate processing | Alexander Matyushkin, Keith Comendant, Adam Mace, Darrell Ehrlich, Felix Kozakevich +1 more | 2025-06-24 |
| 12315705 | Distortion of pulses for wafer biasing | Karl Leeser | 2025-05-27 |
| 12308211 | Systems and methods for use of low frequency harmonics in bias radiofrequency supply to control uniformity of plasma process results across substrate | Alexei Marakhtanov, Felix Kozakevich, Ranadeep Bhowmick | 2025-05-20 |
| 12266505 | Systems and methods for using binning to increase power during a low frequency cycle | Alexei Marakhtanov, Felix Kozakevich, Ranadeep Bhowmick, Bing Ji | 2025-04-01 |
| 12255052 | Process control for ion energy delivery using multiple generators and phase control | Ranadeep Bhowmick, Felix Kozakevich, Alexei Marakhtanov, Eric A. Hudson | 2025-03-18 |
| 12237201 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Alexander Matyushkin, Keith Comendant | 2025-02-25 |
| 12165844 | Uniformity control circuit for impedance match | Alexei Marakhtanov, Felix Kozakevich, Bing Ji | 2024-12-10 |
| 12139791 | Showerhead faceplates with angled gas distribution passages for semiconductor processing tools | Pratik Mankidy, Anthony de la Llera, Rajesh Dorai | 2024-11-12 |
| 12131886 | Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system | Ranadeep Bhowmick, Alexei Marakhtanov, Felix Kozakevich | 2024-10-29 |
| 12080518 | Impedance match with an elongated RF strap | Felix Kozakevich, Alexei Marakhtanov, Bing Ji, Ranadeep Bhowmick | 2024-09-03 |
| 11942351 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Alexander Matyushkin, Keith Comendant | 2024-03-26 |
| 11935730 | Systems and methods for cleaning an edge ring pocket | Eric A. Hudson, Scott Briggs, Alexei Marakhtanov, Felix Kozakevich, Kenneth Lucchesi | 2024-03-19 |
| 11935726 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2024-03-19 |
| 11908660 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, Felix Kozakevich, Bing Ji, Alexei Marakhtanov | 2024-02-20 |
| 11887819 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson | 2024-01-30 |
| 11664262 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Alexander Matyushkin, Keith Comendant | 2023-05-30 |
| 11651991 | Electrostatic Chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, Keith Gaff, Felix Kozakevich | 2023-05-16 |
| 11495441 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson | 2022-11-08 |
| 11335539 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, Felix Kozakevich, Bing Ji, Alexei Marakhtanov | 2022-05-17 |
| 11195706 | Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators | Alexei Marakhtanov, Felix Kozakevich, Michael C. Kellogg, Zhigang Chen, Kenneth Lucchesi +1 more | 2021-12-07 |
| 11158488 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2021-10-26 |