| 12387909 |
Low frequency RF generator and associated electrostatic chuck |
Alexei Marakhtanov, Felix Kozakevich, Bing Ji, John Holland, Alexander Matyushkin |
2025-08-12 |
| 12362159 |
Systems and methods for controlling a plasma sheath characteristic |
Alexei Marakhtanov, James Eugene Caron, John Holland, Felix Kozakevich, Bing Ji |
2025-07-15 |
| 12354840 |
Systems and methods for optimizing power delivery to an electrode of a plasma chamber |
John Holland, Felix Kozakevich, Bing Ji, Alexei Marakhtanov |
2025-07-08 |
| 12308211 |
Systems and methods for use of low frequency harmonics in bias radiofrequency supply to control uniformity of plasma process results across substrate |
Alexei Marakhtanov, Felix Kozakevich, John Holland |
2025-05-20 |
| 12266505 |
Systems and methods for using binning to increase power during a low frequency cycle |
Alexei Marakhtanov, Felix Kozakevich, Bing Ji, John Holland |
2025-04-01 |
| 12255052 |
Process control for ion energy delivery using multiple generators and phase control |
Felix Kozakevich, Alexei Marakhtanov, John Holland, Eric A. Hudson |
2025-03-18 |
| 12131886 |
Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system |
Alexei Marakhtanov, Felix Kozakevich, John Holland |
2024-10-29 |
| 12080518 |
Impedance match with an elongated RF strap |
Felix Kozakevich, Alexei Marakhtanov, Bing Ji, John Holland |
2024-09-03 |
| 11935726 |
High speed synchronization of plasma source/bias power delivery |
Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more |
2024-03-19 |
| 11908660 |
Systems and methods for optimizing power delivery to an electrode of a plasma chamber |
John Holland, Felix Kozakevich, Bing Ji, Alexei Marakhtanov |
2024-02-20 |
| 11335539 |
Systems and methods for optimizing power delivery to an electrode of a plasma chamber |
John Holland, Felix Kozakevich, Bing Ji, Alexei Marakhtanov |
2022-05-17 |
| 11158488 |
High speed synchronization of plasma source/bias power delivery |
Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more |
2021-10-26 |
| 10861708 |
Three or more states for achieving high aspect ratio dielectric etch |
Takumi Yanagawa, Nikhil Dole, Eric A. Hudson, Felix Kozakevich, John Holland +2 more |
2020-12-08 |
| 10504744 |
Three or more states for achieving high aspect ratio dielectric etch |
Takumi Yanagawa, Nikhil Dole, Eric A. Hudson, Felix Kozakevich, John Holland +2 more |
2019-12-10 |
| 10366869 |
Active feedback control of subsystems of a process module |
Scott Riggs, Ryan Bise, John C. Valcore, Jr., Eric A. Hudson |
2019-07-30 |
| 9257300 |
Fluorocarbon based aspect-ratio independent etching |
Eric A. Hudson |
2016-02-09 |
