Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387909 | Low frequency RF generator and associated electrostatic chuck | Alexei Marakhtanov, Felix Kozakevich, Bing Ji, John Holland, Alexander Matyushkin | 2025-08-12 |
| 12362159 | Systems and methods for controlling a plasma sheath characteristic | Alexei Marakhtanov, James Eugene Caron, John Holland, Felix Kozakevich, Bing Ji | 2025-07-15 |
| 12354840 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | John Holland, Felix Kozakevich, Bing Ji, Alexei Marakhtanov | 2025-07-08 |
| 12308211 | Systems and methods for use of low frequency harmonics in bias radiofrequency supply to control uniformity of plasma process results across substrate | Alexei Marakhtanov, Felix Kozakevich, John Holland | 2025-05-20 |
| 12266505 | Systems and methods for using binning to increase power during a low frequency cycle | Alexei Marakhtanov, Felix Kozakevich, Bing Ji, John Holland | 2025-04-01 |
| 12255052 | Process control for ion energy delivery using multiple generators and phase control | Felix Kozakevich, Alexei Marakhtanov, John Holland, Eric A. Hudson | 2025-03-18 |
| 12131886 | Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system | Alexei Marakhtanov, Felix Kozakevich, John Holland | 2024-10-29 |
| 12080518 | Impedance match with an elongated RF strap | Felix Kozakevich, Alexei Marakhtanov, Bing Ji, John Holland | 2024-09-03 |
| 11935726 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2024-03-19 |
| 11908660 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | John Holland, Felix Kozakevich, Bing Ji, Alexei Marakhtanov | 2024-02-20 |
| 11335539 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | John Holland, Felix Kozakevich, Bing Ji, Alexei Marakhtanov | 2022-05-17 |
| 11158488 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2021-10-26 |
| 10861708 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Eric A. Hudson, Felix Kozakevich, John Holland +2 more | 2020-12-08 |
| 10504744 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Eric A. Hudson, Felix Kozakevich, John Holland +2 more | 2019-12-10 |
| 10366869 | Active feedback control of subsystems of a process module | Scott Riggs, Ryan Bise, John C. Valcore, Jr., Eric A. Hudson | 2019-07-30 |
| 9257300 | Fluorocarbon based aspect-ratio independent etching | Eric A. Hudson | 2016-02-09 |