Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387909 | Low frequency RF generator and associated electrostatic chuck | Alexei Marakhtanov, Felix Kozakevich, Ranadeep Bhowmick, John Holland, Alexander Matyushkin | 2025-08-12 |
| 12387916 | Magnetic field control system | Alecia Chantalle Griffin, Anthony de la Llera, Peter Bradley Phillips | 2025-08-12 |
| 12362159 | Systems and methods for controlling a plasma sheath characteristic | Alexei Marakhtanov, James Eugene Caron, John Holland, Felix Kozakevich, Ranadeep Bhowmick | 2025-07-15 |
| 12354840 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, John Holland, Felix Kozakevich, Alexei Marakhtanov | 2025-07-08 |
| 12266505 | Systems and methods for using binning to increase power during a low frequency cycle | Alexei Marakhtanov, Felix Kozakevich, Ranadeep Bhowmick, John Holland | 2025-04-01 |
| 12165844 | Uniformity control circuit for impedance match | Alexei Marakhtanov, Felix Kozakevich, John Holland | 2024-12-10 |
| 12080518 | Impedance match with an elongated RF strap | Felix Kozakevich, Alexei Marakhtanov, Ranadeep Bhowmick, John Holland | 2024-09-03 |
| 11935726 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2024-03-19 |
| 11908660 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, John Holland, Felix Kozakevich, Alexei Marakhtanov | 2024-02-20 |
| 11335539 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, John Holland, Felix Kozakevich, Alexei Marakhtanov | 2022-05-17 |
| 11158488 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2021-10-26 |
| 10916409 | Active control of radial etch uniformity | Alexei Marakhtanov, Felix Kozakevich, John Holland, Kenneth Lucchesi | 2021-02-09 |
| 8741165 | Reducing twisting in ultra-high aspect ratio dielectric etch | Erik A. Edelberg, Takumi Yanagawa | 2014-06-03 |
| 8691701 | Strip with reduced low-K dielectric damage | Andrew D. Bailey, III, Maryam Moravej, Stephen M. Sirard | 2014-04-08 |
| 8236188 | Method for low-K dielectric etch with reduced damage | Kenji Takeshita, Andrew D. Bailey, III, Eric A. Hudson, Maryam Moravej, Stephen M. Sirard +6 more | 2012-08-07 |
| 7977390 | Method for plasma etching performance enhancement | Erik A. Edelberg, Takumi Yanagawa, Zhisong Huang, Lumin Li | 2011-07-12 |
| 7581549 | Method for removing carbon-containing residues from a substrate | Andrew David Johnson, Hoshang Subawalla, Raymond Nicholas Vrtis, Eugene Joseph Karwacki, Jr., Robert Gordon Ridgeway +4 more | 2009-09-01 |
| 7371688 | Removal of transition metal ternary and/or quaternary barrier materials from a substrate | Martin J. Plishka, Dingjun Wu, Peter Badowski, Eugene Joseph Karwacki, Jr. | 2008-05-13 |
| 7357138 | Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials | Stephen Andrew Motika, Ronald Martin Pearlstein, Eugene Joseph Karwacki, Jr., Dingjun Wu | 2008-04-15 |
| 7285154 | Xenon recovery system | Eugene Joseph Karwacki, Jr., Timothy Christopher Golden, Stephen Andrew Motika, Thomas Stephen Farris | 2007-10-23 |
| 7267842 | Method for removing titanium dioxide deposits from a reactor | Dingjun Wu, Philip Bruce Henderson, Eugene Joseph Karwacki, Jr. | 2007-09-11 |
| 7119032 | Method to protect internal components of semiconductor processing equipment using layered superlattice materials | Stephen Andrew Motika, Dingjun Wu, Eugene Joseph Karwacki, Jr., David A. Roberts | 2006-10-10 |
| 7055263 | Method for cleaning deposition chambers for high dielectric constant materials | Dingjun Wu, Stephen Andrew Motika, Eugene Joseph Karwacki, Jr. | 2006-06-06 |
| 6686594 | On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring | Robert Gordon Ridgeway, Eugene Joseph Karwacki, Jr., Howard Paul Withers, Jr., Steven Rogers, Peter J. Maroulis +1 more | 2004-02-03 |
| 6392068 | Carborane containing cholesterol, a new type of molecule for targeted boron drug delivery | Donghao Lu | 2002-05-21 |