Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362146 | Adaptive pulse shaping with post match sensor | Jonathan Smyka, Peter Paul, Aaron Michael Burry | 2025-07-15 |
| 12278090 | Enhanced tuning methods for mitigating RF load impedance variations due to periodic disturbances | Aaron Michael Burry, Peter Paul | 2025-04-15 |
| 12183549 | Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances | Aaron Michael Burry, Mariusz Oldziej, Peter Paul, Ross REINHARDT | 2024-12-31 |
| 12131884 | Pulse and bias synchronization methods and systems | Mariusz Oldziej, Aaron Michael Burry, Michael Kirk | 2024-10-29 |
| 12068725 | Switched capacitor modulator | Duy Nguyen, Albert Kuramshin, Alexander Sergeev Jurkov, Hangon Kim, Kelvin Lee | 2024-08-20 |
| 11996274 | Real-time, non-invasive IEDF plasma sensor | Linnell Martinez, David Miller, Eldridge M. Mount, IV, Peter Paul | 2024-05-28 |
| 11935726 | High speed synchronization of plasma source/bias power delivery | Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry, Jonathan Smyka +5 more | 2024-03-19 |
| 11810762 | Intermodulation distortion mitigation using electronic variable capacitor | Jin-Young Huh, Duy Nguyen, Soohan Kim | 2023-11-07 |
| 11715624 | Adaptive pulse shaping with post match sensor | Jonathan Smyka, Peter Paul, Aaron Michael Burry | 2023-08-01 |
| 11545943 | Switched capacitor modulator | Duy Nguyen, Albert Kuramshin, Alexander Sergeev Jurkov, Hangon Kim, Kelvin Lee | 2023-01-03 |
| 11536755 | System and method for arc detection using a bias RF generator signal | Larry J. Fisk, II, Benjamin J. Gitlin, Mariusz Oldziej, Aaron Michael Burry, Matthew G. Harrington | 2022-12-27 |
| 11533805 | Cooling and compression clamp for short lead power devices | Ky Thoai Luu, Dave Coffta | 2022-12-20 |
| 11527384 | Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances | Aaron Michael Burry, Mariusz Oldziej, Peter Paul, Ross REINHARDT | 2022-12-13 |
| 11367592 | Adaptive periodic waveform controller | Larry J. Fisk, II, Jonathan Smyka | 2022-06-21 |
| 11232931 | Intermodulation distortion mitigation using electronic variable capacitor | Jin-Young Huh, Duy Nguyen, Soohan Kim | 2022-01-25 |
| 11158488 | High speed synchronization of plasma source/bias power delivery | Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry, Jonathan Smyka +5 more | 2021-10-26 |
| 11076477 | Cooling and compression clamp for short lead power devices | Ky Thoai Luu, Dave Coffta | 2021-07-27 |
| 11011940 | Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber | Ky Thoai Luu | 2021-05-18 |
| 10930470 | Pulsed, bidirectional radio frequency source/load | Ky Thoai Luu, Larry J. Fisk, II, Ross REINHARDT, Matthew G. Harrington, Amish Rughoonundon +2 more | 2021-02-23 |
| 10741363 | Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching | Aaron Michael Burry, Aung Toe, Jesse N. Klein | 2020-08-11 |
| 10727027 | Adaptive periodic waveform controller | Larry J. Fisk, II, Jonathan Smyka | 2020-07-28 |
| 10546724 | Pulsed, bidirectional radio frequency source/load | Ky Thoai Luu, Larry J. Fisk, II, Ross REINHARDT, Matthew G. Harrington, Amish Rughoonundon +2 more | 2020-01-28 |
| 10396601 | Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber | Ky Thoai Luu | 2019-08-27 |
| 10229816 | Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network | David J. Coumou, Dennis M. Brown, Mariusz Oldziej, Yogendra K. Chawla, Daniel J. Lincoln | 2019-03-12 |
| 10217609 | Adaptive periodic waveform controller | Larry J. Fisk, II, Jonathon W. Smyka | 2019-02-26 |