Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996274 | Real-time, non-invasive IEDF plasma sensor | David Miller, Eldridge M. Mount, IV, Peter Paul, Aaron T. Radomski | 2024-05-28 |
| 11747494 | Ion filter using aperture plate with plurality of zones | Leslie Michael Lea, Michael Morgan, Russell Westerman | 2023-09-05 |
| 11488865 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2022-11-01 |
| 11315757 | Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications | Jonathan Smyka, Scott C. White, Aaron Michael Burry | 2022-04-26 |
| 10741447 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2020-08-11 |
| 10707060 | Method and apparatus for plasma dicing a semi-conductor wafer | Chris Johnson, David Johnson, David Pays-Volard, Rich Gauldin, Russell Westerman +1 more | 2020-07-07 |
| 10573557 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2020-02-25 |
| 10497621 | Method for dicing a substrate with back metal | Peter Falvo, David Pays-Volard, Rich Gauldin, Russell Westerman | 2019-12-03 |
| 10297427 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2019-05-21 |
| 9911654 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2018-03-06 |
| 9711406 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2017-07-18 |
| RE46339 | Method and apparatus for plasma dicing a semi-conductor wafer | Rich Gauldin, Chris Johnson, David Johnson, David Pays-Volard, Russell Westerman +1 more | 2017-03-14 |
| 9564366 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2017-02-07 |
| 9496177 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2016-11-15 |
| 9368404 | Method for dicing a substrate with back metal | Peter Falvo, David Pays-Volard, Rich Gauldin, Russell Westerman | 2016-06-14 |
| 9343365 | Method and apparatus for plasma dicing a semi-conductor wafer | Thierry Lazerand, David Pays-Volard, Chris Johnson, Russell Westerman, Gordon M. Grivna | 2016-05-17 |
| 9202737 | Method and apparatus for plasma dicing a semi-conductor wafer | Rich Gauldin, Dwarakanath Geerpuram, Ken Mackenzie, Thierry Lazerand, David Pays-Volard +3 more | 2015-12-01 |
| 9202720 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2015-12-01 |
| 9202721 | Method and apparatus for plasma dicing a semi-conductor wafer | Dwarakanath Geerpuram, David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman | 2015-12-01 |
| 9105705 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2015-08-11 |
| 9082839 | Method and apparatus for plasma dicing a semi-conductor wafer | Rich Gauldin, Dwarakanath Geerpuram, Ken Mackenzie, Thierry Lazerand, David Pays-Volard +3 more | 2015-07-14 |
| 9070760 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2015-06-30 |
| 8980764 | Method and apparatus for plasma dicing a semi-conductor wafer | David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna | 2015-03-17 |
| 8946058 | Method and apparatus for plasma dicing a semi-conductor wafer | Rich Gauldin, Chris Johnson, David Johnson, David Pays-Volard, Russell Westerman +1 more | 2015-02-03 |
| 8802545 | Method and apparatus for plasma dicing a semi-conductor wafer | Chris Johnson, David Johnson, David Pays-Volard, Russell Westerman, Gordon M. Grivna | 2014-08-12 |