Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11747494 | Ion filter using aperture plate with plurality of zones | Linnell Martinez, Michael Morgan, Russell Westerman | 2023-09-05 |
| 10943825 | Method for dicing die attach film | Marco Notarianni, Russell Westerman | 2021-03-09 |
| 9412566 | Methods and apparatus for depositing and/or etching material on a substrate | Mark McNie, Michael Cooke | 2016-08-09 |
| 7491649 | Plasma processing apparatus | Jyoti Kiron Bhardwaj | 2009-02-17 |
| 7306745 | Method and apparatus for stabilizing a plasma | Jyoti Kiron Bhardwaj, Edward Guibarra | 2007-12-11 |
| 6929784 | Chlorotrifuorine gas generator system | Jyoti Kiron Bhardwaj, Nicholas E. Shepherd, Graham Hodgson | 2005-08-16 |
| 6602384 | Plasma processing apparatus | Jyoti Kiron Bhardwaj | 2003-08-05 |
| 6602433 | Gas delivery system | Jyoti Kiron Bhardwaj, Nicholas E. Shepherd | 2003-08-05 |
| 6534922 | Plasma processing apparatus | Jyoti Kiron Bhardwaj | 2003-03-18 |
| 6458239 | Plasma processing apparatus | Jyoti Kiron Bhardwaj | 2002-10-01 |
| 6259209 | Plasma processing apparatus with coils in dielectric windows | Jyoti Kiron Bhardwaj | 2001-07-10 |
| 6239404 | Plasma processing apparatus | Edward Guibarra | 2001-05-29 |
| 6187685 | Method and apparatus for etching a substrate | Janet Hopkins, Ian R. Johnston, Jyoti Kiron Bhardwaj, Huma Ashraf, Alan Michael Hynes | 2001-02-13 |