Top Inventors at Plasma-Therm All Time
| Rank | Name | Patents |
|---|---|---|
| 1 | Russell Westerman | 33 |
| 2 | Linnell Martinez | 27 |
| 3 | David Pays-Volard | 26 |
| #4 | Chris Johnson | 22 |
| #5 | Gordon M. Grivna | 22 |
| #6 | Rich Gauldin | 8 |
| #7 | Dwarakanath Geerpuram | 4 |
| #8 | Thierry Lazerand | 3 |
| #9 | Tsu-Wu Chiang | 3 |
| #10 | David Johnson | 2 |
| #11 | Edmond A. Richards | 2 |
| #12 | Jason Doub | 2 |
| #13 | Ken Mackenzie | 2 |
| #14 | Leslie Michael Lea | 2 |
| #15 | Peter Falvo | 2 |
| #16 | Dave Johnson | 1 |
| #17 | David G. Lishan | 1 |
| #18 | Emmanuel Guidotti | 1 |
| #19 | Fabien Piallat | 1 |
| #20 | Gilles Baujon | 1 |
| #21 | Glyn Reynolds | 1 |
| #22 | John F. Donohue | 1 |
| #23 | Julien Richard | 1 |
| #24 | Julien Vitiello | 1 |
| #25 | Mark D. Kenney | 1 |
| #26 | Marco Notarianni | 1 |
| #27 | Marc Segers | 1 |
| #28 | Michael W. DeVre | 1 |
| #29 | Mike DeVre | 1 |
| #30 | Michael Morgan | 1 |
| #31 | Michael Teixeira | 1 |
| #32 | Paul Fournier | 1 |
| #33 | Patrick Rabinzohn | 1 |
| #34 | Shinzo Onishi | 1 |
| #35 | Vincent Girault | 1 |
| #36 | Wade Dawson | 1 |
| #37 | Yannick Pilloux | 1 |
| #38 | Abdul Lateef | 1 |