Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262864 | Point-of-use enrichment of gas mixtures for semiconductor structure fabrication and systems for providing point-of-use enrichment of gas mixtures | Taiqing Qiu, Xiao Bai | 2019-04-16 |
| 8956761 | Lithium ion battery and method for manufacturing of such battery | Robert Mamazza, JR. | 2015-02-17 |
| 8890476 | Fuel cell/supercapacitor/battery power system for vehicular propulsion | Werner Oskar Martienssen | 2014-11-18 |
| 8863363 | Method for fabricating a supercapacitor electronic battery | Werner Oskar Martienssen | 2014-10-21 |
| 8790801 | Integrated electrochemical and solar cell | — | 2014-07-29 |
| 8139340 | Conductive seal ring electrostatic chuck | — | 2012-03-20 |
| 7001491 | Vacuum-processing chamber-shield and multi-chamber pumping method | Michael J. Lombardi, Robert F. Foster, Robert Rowan, Frederick T. Turner | 2006-02-21 |
| 6929720 | Sputtering source for ionized physical vapor deposition of metals | — | 2005-08-16 |
| 6755945 | Ionized PVD with sequential deposition and etching | Tugrul Yasar, Frank M. Cerio, Jr., Bruce Gittleman, Michael Grapperhaus, Rodney L. Robison | 2004-06-29 |
| 6719886 | Method and apparatus for ionized physical vapor deposition | John Drewery, Derrek Andrew Russell, Jozef Brcka, Mirko Vukovic, Michael Grapperhaus +2 more | 2004-04-13 |
| 6692219 | Reduced edge contact wafer handling system and method of retrofitting and using same | Stephen Dale Coomer, Stanislaw Kopacz, Michael J. Lombardi, Todd Michael Visconti | 2004-02-17 |
| 6652711 | Inductively-coupled plasma processing system | Jozef Brcka, John Drewery, Michael Grapperhaus, Gerrit J. Leusink, Mirko Vukovic +1 more | 2003-11-25 |
| 6417626 | Immersed inductively—coupled plasma source | Jozef Brcka, John Drewery, Michael Grapperhaus, Gerrit J. Leusink, Mirko Vukovic +1 more | 2002-07-09 |
| 6287435 | Method and apparatus for ionized physical vapor deposition | John Drewery, Derrek Andrew Russell, Jozef Brcka, Mirko Vukovic, Michael Grapperhaus +2 more | 2001-09-11 |
| 6183564 | Buffer chamber for integrating physical and chemical vapor deposition chambers together in a processing system | Joseph T. Hillman | 2001-02-06 |
| 6156164 | Virtual shutter method and apparatus for preventing damage to gallium arsenide substrates during processing | Jason Smolanoff, Doug Caldwell | 2000-12-05 |
| 5825848 | X-ray target having big Z particles imbedded in a matrix | Gary Virshup | 1998-10-20 |