Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501866 | Gas distribution apparatus for improved film uniformity in an epitaxial system | Robert Vyne, Timo Bergman, Lee Bode, Wentao Wang | 2019-12-10 |
| 10312129 | Variable adjustment for precise matching of multiple chamber cavity housings | — | 2019-06-04 |
| 9960072 | Variable adjustment for precise matching of multiple chamber cavity housings | — | 2018-05-01 |
| 6869266 | Apparatus and methods for manipulating semiconductor wafers | John McIntee, Jozsef Michael Iha, Robert T. Borra, Eric Lusby, Michael J. Lombardi | 2005-03-22 |
| 6692219 | Reduced edge contact wafer handling system and method of retrofitting and using same | Stanislaw Kopacz, Glyn Reynolds, Michael J. Lombardi, Todd Michael Visconti | 2004-02-17 |
| 6612590 | Apparatus and methods for manipulating semiconductor wafers | John McIntee, Jozsef Michael Iha, Robert T. Borra, Eric Lusby, Michael J. Lombardi | 2003-09-02 |